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公开(公告)号:JPH10256528A
公开(公告)日:1998-09-25
申请号:JP7460497
申请日:1997-03-10
Applicant: AGENCY IND SCIENCE TECHN
Inventor: MURAKAMI JUNICHI , OI YUTAKA , YOSHIMURA KAZUNORI , IGARASHI KAZUO , TANEMURA SAKAE , GOTO MASAHIRO
IPC: B22F9/02 , B22F1/02 , B22F9/14 , C23C14/00 , C23C14/35 , C30B23/00 , H01L21/285 , H01L29/06 , H01L29/66
Abstract: PROBLEM TO BE SOLVED: To provide a method for generating layer aluminum fine particles and an application to a single electron tunneling quantum device. SOLUTION: Metal aluminum is supplied into mixed gas of helium and steam of 1×10 to 3×10 Torr by sputtering metal aluminum by discharging argon gas, aggregation is generated, then discharged into vacuum to generate single crystal covered on a surface layer with aluminum, thereby forming spherical metal aluminum fine particles (layered aluminum fine particles). The particles are carried on a flow of the helium gas, discharged into vacuum via an aperture, and deposited directly on a board to generate layered aluminum particles of a particle size of 5 to 500nm. The vicinity of an outlet of particle generation source is cooled by the nitrogen or a distance between an aluminum target and the aperture is set to 30 to 50mm, thereby generating the layered aluminum fine particles. Further, single electron tunneling quantum device element using the layered aluminum fine particles obtained by the method is set.
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公开(公告)号:JP2001098372A
公开(公告)日:2001-04-10
申请号:JP27189899
申请日:1999-09-27
Applicant: AGENCY IND SCIENCE TECHN
Inventor: MURAKAMI JUNICHI , YOSHIMURA KAZUNORI , OI YUTAKA , MARUYAMA YUTAKA , YAMAGUCHI WATARU
IPC: H01L21/203 , B01J19/00 , C23C14/46
Abstract: PROBLEM TO BE SOLVED: To provide a nanostructure by a microcluster and a method for making the same. SOLUTION: This method for making the nanostructure consists in making the nanostructure of the single size microcluster by driving the microcluster ions of a metal, semiconductor, etc., of a single size which are formed by an ion beam sputtering method and are narrowed in their translation energy width to
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公开(公告)号:JP2000272912A
公开(公告)日:2000-10-03
申请号:JP8278999
申请日:1999-03-26
Applicant: AGENCY IND SCIENCE TECHN
Inventor: OZAKI TOSHIHIKO , OI YUTAKA
Abstract: PROBLEM TO BE SOLVED: To provide a method for efficiently producing hydrogenated fullerene as a material for hydrogen storage and to provide a method for recovering hydrogen from the hydrogenated fullerene. SOLUTION: A transformation method comprises transforming C60 fullerene into hydrogenated fullerene and vice versa both in the presence of a Ni/Al2O3 catalyst where active alumina is impregnated with nickel to support it. This method for producing hydrogenated fullerene comprises utilizing a transformation reaction in the presence of a Ni/Al2O3 catalyst where active alumina is impregnated with nickel to support it in order to transform C60 fullerene into hydrogenated fullerene C60H36 under a mildly hydrogenating condition at high efficiency and selectivity.
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公开(公告)号:JPH10279328A
公开(公告)日:1998-10-20
申请号:JP9807397
申请日:1997-03-31
Applicant: AGENCY IND SCIENCE TECHN
Inventor: TAJIRI KOJI , NISHIO TOSHIYUKI , IGARASHI KAZUO , OI YUTAKA
Abstract: PROBLEM TO BE SOLVED: To provide an aerogel firmly joined to a glass by dipping the glass on which the aerogel is to be produced in a soln. such as a hydrofluoric acid soln. capable of etching the glass surface, cleaning the glass, pouring a mixture liquid of the start source material for a wet gel onto the surface without exposing the glass surface to air to produce a wet gel, and then subjecting the wet gel to supercritical drying. SOLUTION: A glass is dipped in a soln. such as a hydrofluoric acid soln. or acid ammonium fluoride soln. which corrodes the glass surface, and then the glass is cleaned. Then without exposing the glass surface to air, a reaction liquid as an aerogel precursor is made to flow on the surface to cause gelation or polymn. on the glass surface to produce a wet gel adhered to the glass. Then the produced wet gel is subjected to supercritical drying. As for the reaction liquid as the aerogel precursor, for example, a mixture liquid of alkoxide silicate or its oligomer and water and alcohol is used, and if necessary, with addition of alkali or acid as a catalyst.
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公开(公告)号:JPH10152322A
公开(公告)日:1998-06-09
申请号:JP32604796
申请日:1996-11-20
Applicant: AGENCY IND SCIENCE TECHN
Inventor: MURAKAMI JUNICHI , OI YUTAKA , YOSHIMURA KAZUNORI , IGARASHI KAZUO , TANEMURA SAKAE , GOTO MASAHIRO
Abstract: PROBLEM TO BE SOLVED: To provide a method of formation of θ-alumina particles which has large surface areas and is useful as a carrier of metal catalyst, and a catalyst carrier. SOLUTION: This method of formation of θ-alumina particles of 5-200nm diameter comprises spattering metal aluminum powder by electric discharge in argon gas, feeding the aluminum into a gaseous mixture of helium and water to form fine θ-alumina particles by coagulation while controlling the particle size by growing the particles by using metal tubes or reducing particle size by cooling with liquid nitrogen, and depositing the particles on a substrate, thus producing alumina particles of 20nm or less size which has a large surface area and is useful as a carrier of metal catalysts.
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