公开(公告)号：JPH09257915A

公开(公告)日：1997-10-03

申请号：JP6217996

申请日：1996-03-19

Applicant: AGENCY IND SCIENCE TECHN

Inventor： ITO HIDEO ,  MUKAI SEIJI ,  WATANABE MASANOBU ,  DEIITAA BURANDORU ,  UIRUHERUMU SUTOOKU

IPC: G01P3/36 ,  G01P5/00 ,  G01P5/20 ,  G01S7/48 ,  G01S17/58 ,  H01S3/00 ,  H01S3/23 ,  H01S3/25

Abstract: PROBLEM TO BE SOLVED: To reduce the size and power consumption of a laser Doppler speed measuring instrument having a fringe movement function. SOLUTION: An outgoing laser beam IB of a beam deflection semiconductor laser 20 is made to enter a beam splitter 13 after through a collimator lens system 12 and then to pass through an optical path length controlling element 14. After that, two laser beams 11 and 12 are made to converge on a micro area zone on a face to be measured 17 by a convergent lens system. At measurement of a moving speed of the face to be measured 17, the laser beam IB outgoing from the beam deflection semiconductor laser source 210 is deflected within a range of an angle α.