STRUCTURE AND METHOD FOR SEALING A SILICON IC

    公开(公告)号:WO2023019070A1

    公开(公告)日:2023-02-16

    申请号:PCT/US2022/074392

    申请日:2022-08-01

    Applicant: APPLE INC.

    Abstract: Chip sealing structures and methods of manufacture are described. In an embodiment, a chip structure includes a main body area formed of a substrate, a back-end-of-the-line (BEOL) build-up structure spanning over the substrate, and chip edge sidewalls extending from a back surface of the substrate to a top surface of the BEOL build-up structure and laterally surrounding the substrate and the BEOL build-up structure. In accordance with embodiments, the chip structure may further include a conformal sealing layer covering at least a first chip edge sidewall of the chip edge sidewalls and a portion of the top surface of the BEOL build-up structure, and forming a lip around the top surface of the BEOL build-up structure.

    SEAL RING DESIGNS SUPPORTING EFFICIENT DIE TO DIE ROUTING

    公开(公告)号:WO2022191974A1

    公开(公告)日:2022-09-15

    申请号:PCT/US2022/016785

    申请日:2022-02-17

    Applicant: APPLE INC.

    Abstract: Chip sealing structures which can accommodate die-to-die communication are described. In an embodiment, a chip structure includes a split metallic seal structure including a lower metallic seal and an upper metallic seal with overlapping metallization layers, and a through seal interconnect navigating through the split metallic seal structure. In other embodiments, sealed box structures are described in which the die-to-die routing jumps over the seal structures, or is formed on a back side of the semiconductor substrate and connected to through silicon vias. In yet other embodiments, electromagnetic field communication structures are described to accommodate wireless die-to-die communication across sealing structures without physical wiring.

    HIGH DENSITY 3D INTERCONNECT CONFIGURATION
    7.
    发明申请

    公开(公告)号:WO2021158419A1

    公开(公告)日:2021-08-12

    申请号:PCT/US2021/015441

    申请日:2021-01-28

    Applicant: APPLE INC.

    Abstract: Electronic package structures and systems are described in which a 3D interconnect structure is integrated into a package redistribution layer and/or chiplet for power and signal delivery to a die. Such structures may significantly improve input output (IO) density and routing quality for signals, while keeping power delivery feasible.

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