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    ENERGY DISPERSIVE X-RAY SPECTROSCOPY SENSING UNIT
    2.
    发明公开
    ENERGY DISPERSIVE X-RAY SPECTROSCOPY SENSING UNIT 审中-公开

    公开(公告)号：US20240057957A1

    公开(公告)日：2024-02-22

    申请号：US18110328

    申请日：2023-02-15

    Applicant: Applied Materials Israel Ltd.

    Inventor： Martin Chauvin ,  Eugene Brozgol ,  Marat Feldman ,  Yosef Basson ,  Itay Asulin ,  Shmuel Nakash ,  Jacob Levin

    IPC: A61B6/00

    CPC classification number: A61B6/482 ,  A61B6/40 ,  A61B6/52

    Abstract: An energy-dispersive x-ray spectroscopy (EDX) sensing unit, the EDX sensing unit include a protective unit and an x-ray sensor that includes one or more sensing regions. The protective unit is configured to (i) introduce a change in one or more properties of electrons emitted from a sample, thereby preventing the electrons emitted from the sample from reaching the one or more sensing regions, the electrons are emitted from the sample due to an illuminating of the sample by a primary electron beam, and (ii) increase a safety of operation of the EDX sensing unit. The x-ray sensor is configured to (i) receive, by the one or more sensing regions, x-ray photons emitted from the sample due to the illuminating of the sample, and (ii) generate detection signals indicative of the x-ray photons.

    System for inspecting and reviewing a sample
    5.
    发明授权
    System for inspecting and reviewing a sample 有权

    公开(公告)号：US10177048B2

    公开(公告)日：2019-01-08

    申请号：US14639003

    申请日：2015-03-04

    Applicant: APPLIED MATERIALS ISRAEL LTD.

    Inventor： Juergen Frosien ,  Jacob Levin ,  Igor Krivts (Krayvitz) ,  Yoram Uziel ,  Boris Golberg

    IPC: H01J37/20 ,  H01L21/66 ,  H01J37/22 ,  H01J37/26 ,  H01J37/29

    Abstract: A system for inspecting and reviewing a sample, the system may include a chamber that is arranged to receive the sample and to maintain vacuum within the chamber during at least a scan period; an inspection unit; a review unit; and a mechanical stage for moving the sample, according to a scan pattern and during the scan period, in relation to the inspection unit and the review unit while a spatial relationship between the inspection unit and the review unit remains unchanged; wherein the inspection unit is arranged to detect, during the scan period, multiple suspected defects of the sample; and wherein the review unit is arranged to (a) receive, during the scan period, information about the multiple suspected defects; and (b) locate, during the scan period and in response to the information about the multiple suspected defects, at least one actual defect.

    Sensor for electron detection
    7.
    发明授权
    Sensor for electron detection 有权

    公开(公告)号：US11355309B2

    公开(公告)日：2022-06-07

    申请号：US17265187

    申请日：2019-08-01

    Applicant: APPLIED MATERIALS ISRAEL LTD.

    Inventor： Itay Assulin ,  Jacob Levin ,  Guy Eytan

    IPC: H01J37/244

    Abstract: The present invention relates to a sensor for electron detection emitted from an object to be used with a charged particle beam column being operated at a certain column and wafer voltage. The sensor is configured and operable to at least reduce interaction of negative ions with the active area of the sensor while minimizing electrons energy loss. The sensor is also configured and operable to minimize both gradual degradation of a cathodoluminescence efficiency of the active area and dynamic change of cathodoluminescence generated during operation of the sensor and evolving throughout the scintillator's lifetime.

    SENSOR FOR ELECTRON DETECTION
    8.
    发明申请
    SENSOR FOR ELECTRON DETECTION 有权

    公开(公告)号：US20210319976A1

    公开(公告)日：2021-10-14

    申请号：US17265187

    申请日：2019-08-01

    Applicant: APPLIED MATERIALS ISRAEL LTD.

    Inventor： Itay Assulin ,  Jacob Levin ,  Guy Eytan

    IPC: H01J37/244

    Abstract: The present invention relates to a sensor for electron detection emitted from an object to be used with a charged particle beam column being operated at a certain column and wafer voltage. The sensor is configured and operable to at least reduce interaction of negative ions with the active area of the sensor while minimizing electrons energy loss. The sensor is also configured and operable to minimize both gradual degradation of a cathodoluminescence efficiency of the active area and dynamic change of cathodoluminescence generated during operation of the sensor and evolving throughout the scintillator's lifetime.

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