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    METHOD AND SYSTEM FOR EVALUATING OBJECTS
    1.
    发明申请
    METHOD AND SYSTEM FOR EVALUATING OBJECTS 有权

    公开(公告)号：US20210151214A1

    公开(公告)日：2021-05-20

    申请号：US16689567

    申请日：2019-11-20

    Applicant: APPLIED MATERIALS ISRAEL LTD.

    Inventor： Igor Krivts (Krayvitz) ,  Efim Vinnitsky ,  Yoram Uziel ,  Benzion Sender ,  Ron Naftali

    IPC: G21K1/087 ,  G21K1/10 ,  G06K9/00 ,  G06K9/32

    Abstract: A method and a system. The system may include (a) evaluation units, (b) an object distribution system for receiving the objects and distributing the objects between the evaluation units, and (c) at least one controller. Each evaluation unit may include (i) a chamber housing that has an inner space, (ii) a chuck, (iii) a movement system that is configured to move the chuck, and (iv) a charged particle module that is configured to irradiate the object with a charged particle beam, and to detect particles emitted from the object. In each evaluation unit a length of the inner space is smaller than twice a length of the object, and a width of the inner space is smaller than twice a width of the object.

    Chamber elements and a method for placing a chamber at a load position
    3.
    发明授权
    Chamber elements and a method for placing a chamber at a load position 有权
    腔室元件和用于将腔室放置在负载位置的方法

    公开(公告)号：US09302358B2

    公开(公告)日：2016-04-05

    申请号：US13944815

    申请日：2013-07-17

    Applicant: APPLIED MATERIALS ISRAEL, LTD.

    Inventor： Igor Krayvitz (Krivts) ,  Israel Avneri ,  Yoram Uziel ,  Natan Schlimoff ,  Gilad Schwartz ,  Yochanan Madmon

    IPC: B23Q3/00 ,  H01L21/67 ,  B08B3/04 ,  C23C16/44

    CPC classification number: B23Q3/00 ,  B08B3/04 ,  C23C16/4409 ,  H01L21/6715 ,  H01L21/6719 ,  H01L21/67201

    Abstract: Chamber elements defining a chamber include a first element having a first surface, a second element, a first dynamic seal and load mechanism. The second element includes an outer floating element that includes a second surface about the periphery of the chamber, and an inner floating element. The second surface and the first surface are maintained proximate to each other when the chamber is in a load position and when the chamber is closed. The load mechanism may move the inner floating element from the outer floating element until a gap between the inner floating element and the second element to facilitate loading of the device to the chamber. A movement system may generate relative movement between the first element and the second element.

    Abstract translation: 限定腔室的室元件包括具有第一表面的第一元件，第二元件，第一动态密封件和负载机构。 第二元件包括外部浮动元件，其包括围绕室的周边的第二表面和内部浮动元件。 当腔室处于加载位置和腔室关闭时，第二表面和第一表面保持彼此靠近。 负载机构可以将内部浮动元件从外部浮动元件移动到内部浮动元件和第二元件之间的间隙，以便于将装置加载到腔室。 移动系统可以在第一元件和第二元件之间产生相对移动。

    EVALUATION SYSTEM AND A METHOD FOR EVALUATING A SUBSTRATE
    4.
    发明申请
    EVALUATION SYSTEM AND A METHOD FOR EVALUATING A SUBSTRATE 有权
    评估系统和评估基板的方法

    公开(公告)号：US20160077016A1

    公开(公告)日：2016-03-17

    申请号：US14946693

    申请日：2015-11-19

    Applicant: APPLIED MATERIALS ISRAEL LTD.

    Inventor： Yoram Uziel ,  Ron Naftali ,  Ofer Adan ,  Haim Feldman ,  Ofer Shneyour ,  Ron Bar-Or

    IPC: G01N21/88 ,  G01Q60/24 ,  G01Q20/02

    CPC classification number: G01N21/88 ,  G01Q10/065 ,  G01Q20/02 ,  G01Q60/06 ,  G01Q60/24 ,  G01Q70/06

    Abstract: There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.

    Abstract translation: 可以提供可以包括包括原子力显微镜（AFM）和固体浸没透镜的空间传感器的评估系统。 AFM布置成产生表示固体浸没透镜和基底之间的空间关系的空间关系信息。 所述控制器被布置为接收所述空间关系信息，并且向所述至少一个位置校正元件发送校正信号，以在所述固体浸没透镜和所述基板之间引入期望的空间关系。

    SYSTEM AND METHOD FOR INSPECTING A SAMPLE USING LANDING LENS
    5.
    发明申请
    SYSTEM AND METHOD FOR INSPECTING A SAMPLE USING LANDING LENS 有权
    使用着陆镜检查样品的系统和方法

    公开(公告)号：US20140231632A1

    公开(公告)日：2014-08-21

    申请号：US13772287

    申请日：2013-02-20

    Applicant: APPLIED MATERIALS ISRAEL, LTD.

    Inventor： Yoram Uziel ,  Alon Litman ,  Ofer Adan ,  Ron Naftali ,  Juergen Frosien

    IPC: G01J1/04

    CPC classification number: G01J1/0266 ,  G01J1/0422 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G02B13/001 ,  G02B21/0016 ,  G02B21/24

    Abstract: An evaluation system that includes a miniature module that comprises a miniature objective lens and a miniature supporting module; wherein the miniature supporting module is arranged, when placed on a sample, to position the miniature objective lens at working distance from the sample; wherein the miniature objective lens is arranged to gather radiation from an area of the sample when positioned at the working distance from the sample; a sensor arranged to detect radiation that is gathered by the miniature objective lens to provide detection signals indicative of the area of the sample.

    Abstract translation: 一种包括微型模块的评估系统，包括微型物镜和微型支撑模块; 其中所述微型支撑模块布置在放置在样本上以使所述微型物镜定位在距离所述样品的工作距离处; 其中所述微型物镜被布置成在距所述样品的工作距离处定位时收集来自所述样品的区域的辐射; 传感器，被布置成检测由微型物镜聚集的辐射，以提供指示样品面积的检测信号。

    Method and system for evaluating objects
    9.
    发明授权
    Method and system for evaluating objects 有权

    公开(公告)号：US11177048B2

    公开(公告)日：2021-11-16

    申请号：US16689567

    申请日：2019-11-20

    Applicant: APPLIED MATERIALS ISRAEL LTD.

    Inventor： Igor Krivts (Krayvitz) ,  Efim Vinnitsky ,  Yoram Uziel ,  Benzion Sender ,  Ron Naftali

    IPC: G21K1/087 ,  G06K9/32 ,  G06K9/00 ,  G21K1/10

    Abstract: A method and a system. The system may include (a) evaluation units, (b) an object distribution system for receiving the objects and distributing the objects between the evaluation units, and (c) at least one controller. Each evaluation unit may include (i) a chamber housing that has an inner space, (ii) a chuck, (iii) a movement system that is configured to move the chuck, and (iv) a charged particle module that is configured to irradiate the object with a charged particle beam, and to detect particles emitted from the object. In each evaluation unit a length of the inner space is smaller than twice a length of the object, and a width of the inner space is smaller than twice a width of the object.

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