公开(公告)号：US20240218512A1

公开(公告)日：2024-07-04

申请号：US18395822

申请日：2023-12-26

Applicant: ASM IP Holding B.V.

Inventor： Madhan Kumar Arulanandam ,  Balaji Kannan ,  Jereld Lee Winkler

IPC: C23C16/455

CPC classification number: C23C16/45561 ,  C23C16/45544 ,  C23C16/45557 ,  C23C16/45591

Abstract: Various embodiments of the present technology may provide an accumulator having an interior region defined by a plurality of sidewalls. The accumulator may include an inlet disposed in a first sidewall and an outlet disposed within a second sidewall. The accumulator may also include a piston disposed within the interior region and a rod coupled to the piston, wherein the rod extends outside the interior region through a third sidewall.