公开(公告)号：WO2021078534A1

公开(公告)日：2021-04-29

申请号：PCT/EP2020/078350

申请日：2020-10-09

Applicant: ASML NETHERLANDS B.V.

Inventor： NIKIPELOV, Andrey ,  BANINE, Vadim, Yevgenyevich ,  BLOM, Sander ,  DE VRIES, Gosse, Charles ,  NIENHUYS, Han-Kwang ,  SBRIZZAI, Fabio

IPC: G03F1/62 ,  G03F1/82 ,  G03F7/20 ,  B08B7/02

Abstract: A membrane cleaning apparatus for removing particles from a membrane comprises: a membrane support; a controlled environment chamber and cleaning substance delivery mechanism. The particles of the cleaning substance delivered to membrane sublime in the controlled environment without leaving residue. The combination of masks, apertures and gas drag in the controlled environment allow to provide cleaning substance particles with speed in the range about 1-100 m/s (preferably about 3-30 m/s) and size in the range about 1-100 um (preferably 1-10 um) to the membrane, such that two-phase flow cleans but does not rupture the thin and fragile membrane.