公开(公告)号：WO2023280487A1

公开(公告)日：2023-01-12

申请号：PCT/EP2022/065032

申请日：2022-06-02

Applicant: ASML NETHERLANDS B.V.

Inventor： LIANG, Haoyi ,  CHEN, Zhichao ,  PU, Lingling ,  CHANG, Fang-Cheng ,  YU, Liangjiang ,  WANG, Zhe

IPC: G06T3/00 ,  G06T7/33

Abstract: An improved systems and methods for correcting distortion of an inspection image are disclosed. An improved method for correcting distortion of an inspection image comprises acquiring an inspection image, aligning a plurality of patches of the inspection image based on a reference image corresponding to the inspection image, evaluating, by a machine learning model, alignments between each patch of the plurality of patches and a corresponding patch of the reference image, determining local alignment results for the plurality of patches of the inspection image based on a reference image corresponding to the inspection image, determining an alignment model based on the local alignment results, and correcting a distortion of the inspection image based on the alignment model.

公开(公告)号：EP4367627A1

公开(公告)日：2024-05-15

申请号：EP22734500.6

申请日：2022-06-02

Applicant: ASML Netherlands B.V.

Inventor： LIANG, Haoyi ,  CHEN, Zhichao ,  PU, Lingling ,  CHANG, Fang-Cheng ,  YU, Liangjiang ,  WANG, Zhe

IPC: G06T3/00 ,  G06T7/33

CPC classification number: G06T7/337 ,  G06T3/14 ,  G06T5/80