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1.发明申请RADIATION SOURCE, LITHOGRAPHIC APPARATUS DEVICE MANUFACTURING METHOD, SENSOR SYSTEM AND SENSING METHOD 审中-公开辐射源，光刻设备制造方法，传感器系统和感测方法公开(公告)号：US20160209753A1
公开(公告)日：2016-07-21
申请号：US15024815
申请日：2014-09-18
Applicant: ASML NETHERLANDS B.V.
Inventor： Chuangxin ZHAO , Pär Mårten Lukas BROMAN , Richard Joseph BRULS , Cristian Bogdan CRAUS , Jan GROENEWOLD , Dzmitry LABETSKI , Kerim NADIR , Hendrikus Gijsbertsu SCHIMMEL , Christian Felix WäHLISCH
CPC classification number: G03F7/70033 , G03F7/70058 , G03F7/70175 , G03F7/70916 , H05G2/005
Abstract: A radiation source for a lithographic apparatus, in particular a laser-produced plasma source includes a fan unit surrounding but not obstructing the collected radiation beam that is operated to generate a flow in a buffer gas away from the optical axis. The fan unit can include a plurality of flat or curved blades generally parallel to the optical axis and driven to rotate about the optical axis.
Abstract translation: 用于光刻设备，特别是激光产生的等离子体源的辐射源包括风扇单元，其围绕但不阻碍收集的辐射束，其被操作以产生远离光轴的缓冲气体中的流。 风扇单元可以包括大致平行于光轴并被驱动以围绕光轴旋转的多个平面或弯曲的叶片。
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公开(公告)号：US20230333314A1
公开(公告)日：2023-10-19
申请号：US18213085
申请日：2023-06-22
Applicant: ASML NETHERLANDS B.V.
Inventor： Amir ABDOLVAND , Cristian Bogdan CRAUS , Anna EZERSKAIA , Phani Kumar DOMALAPALLY
CPC classification number: G02B6/02304 , G02B6/032 , G02B2006/0325
Abstract: An optical component for a broadband radiation source device, the optical component configured for generating a broadband output upon receiving pump radiation and including: a hollow-core photonic crystal fiber (HC-PCF); and a gas mixture filling the HC-PCF, wherein the gas mixture includes a mixture of at least one first gas configured for the generation of the broadband radiation and at least one second gas including or consisting of helium.
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公开(公告)号：US20230296829A1
公开(公告)日：2023-09-21
申请号：US18017059
申请日：2021-07-12
Applicant: ASML NETHERLANDS B.V.
Inventor： Amir ABDOLVAND , Cristian Bogdan CRAUS , Sebastian Thomas BAUERSCHMIDT
CPC classification number: G02B6/032 , G02B6/25 , G02B6/02328 , G02B2006/0325
Abstract: A method of processing an out-coupling end of a hollow core fiber including a plurality of anti-resonance elements surrounding a hollow core, and a hollow core fiber having been so processed. The method may include performing a tapering step to form a taper in the anti-resonance elements; performing a cleaving step at the taper to form at least one tapered out-coupling end of the hollow core fiber; and performing an end processing step including further heating the out-coupling end in a controlled manner to smoothen the out-coupling end.
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公开(公告)号：US20220011500A1
公开(公告)日：2022-01-13
申请号：US17361449
申请日：2021-06-29
Applicant: ASML NETHERLANDS B.V.
Inventor： Amir ABDOLVAND , Cristian Bogdan CRAUS , Anna EZERSKAIA , Phani Kumar DOMALAPALLY
Abstract: An optical component for a broadband radiation source device, the optical component configured for generating a broadband output upon receiving pump radiation and including: a hollow-core photonic crystal fiber (HC-PCF); and a gas mixture filling the HC-PCF, wherein the gas mixture includes a mixture of at least one first gas configured for the generation of the broadband radiation and at least one second gas including or consisting of helium.
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