公开(公告)号：WO2014082961A1

公开(公告)日：2014-06-05

申请号：PCT/EP2013/074613

申请日：2013-11-25

Applicant: ASML NETHERLANDS B.V.

Inventor： VAN DER WAL, Marinus, Maria, Johannes ,  AANGENENT, Wilhelmus, Henricus, Theodorus, Maria ,  KAMIDI, Ramidin, Izair ,  MANSSOURI, Khalid

IPC: G03F7/20

CPC classification number: G03F7/70725 ,  G03F7/70341 ,  G03F7/70758 ,  G03F7/70783

Abstract: A lithographic apparatus including: an object having compliant dynamics; a plurality of actuators configured to act on the driven object, wherein the plurality of actuators are over- determined in an actuator degree of freedom; a control system including a transformation matrix configured to generate controller output signals for each of the plurality of actuators in response to a sequence of setpoints, wherein the transformation matrix is configured such that the controller output signals do not excite the compliant dynamics of the object in at least one degree of freedom.

Abstract translation: 一种光刻设备，包括：具有柔顺动力学的物体; 多个致动器，其被构造成作用在被驱动物体上，其中所述多个致动器在致动器的自由度中被过度确定; 控制系统，其包括变换矩阵，其被配置为响应于设定点序列而产生用于所述多个致动器中的每一个的控制器输出信号，其中所述变换矩阵被配置为使得所述控制器输出信号不激发所述对象的所述柔性动力学 至少一个自由度。

公开(公告)号：WO2021037453A1

公开(公告)日：2021-03-04

申请号：PCT/EP2020/070979

申请日：2020-07-24

Applicant: ASML NETHERLANDS B.V.

Inventor： VAN KEULEN, Thijs, Adriaan, Cornelis ,  COX, Hendrikus, Herman, Marie ,  KAMIDI, Ramidin, Izair ,  KOENEN, Willem, Herman, Gertruda, Anna

IPC: G03F7/20 ,  G03F9/00 ,  G05B19/19 ,  H01L21/67 ,  H01L21/68 ,  G06T7/00 ,  G01N21/956

Abstract: The invention provides a method of determining a desired relative position between a first object of a lithographic apparatus and a second object of the lithographic apparatus, the method comprising: a. generating a measurement signal representing a position of the first object relative to the second object, at an initial relative position; b. determining a gradient associated with the initial relative position, based on the measurement signal; c. determining a position set point based on the gradient; d. controlling the position of the first object relative to the second object to a further relative position, based on the position set point.

公开(公告)号：WO2015062791A1

公开(公告)日：2015-05-07

申请号：PCT/EP2014/070472

申请日：2014-09-25

Applicant: ASML NETHERLANDS B.V.

Inventor： BUTLER, Hans ,  KAMIDI, Ramidin, Izair ,  KASEMSINSUP, Yanin

IPC: G03F7/20

CPC classification number: G03F7/70775 ,  G01B9/02 ,  G01B11/002 ,  G03F7/70725

Abstract: An object positioning system includes an object (P); a measurement system (MS) for measuring the position (APOS) of the object; an actuator system (AS) for positioning the object; a control system (CU, OBS) configured to drive the actuator system, wherein each sensor of the measurement system has an associated measurement area on the object, wherein a location of at least one measurement area on the object is dependent on the position of the object, wherein the control system (CU, OBS) comprises an observer (OBS) with a dynamic model of the object to estimate an internal dynamic behavior (IDB) of the object, wherein the dynamic model includes the dependency of the location of at least one measurement area on the position of the object, and wherein the control system (CU, OBS) is configured to drive the actuator system (AS) in dependency of an output (IDB) of the observer (OBS) as well.

Abstract translation: 物体定位系统包括物体（P）; 用于测量物体的位置（APOS）的测量系统（MS）; 用于定位物体的致动器系统（AS）; 配置为驱动所述致动器系统的控制系统（CU，OBS），其中所述测量系统的每个传感器在所述物体上具有相关联的测量区域，其中所述物体上的至少一个测量区域的位置取决于所述物体的位置 对象，其中所述控制系统（CU，OBS）包括具有所述对象的动态模型的观察者（OBS）以估计所述对象的内部动态行为（IDB），其中所述动态模型包括至少所述位置的依赖性 所述对象的位置上的一个测量区域，并且其中所述控制系统（CU，OBS）被配置为依赖于所述观察者（OBS）的输出（IDB）来驱动所述致动器系统（AS）。

公开(公告)号：EP2926198A1

公开(公告)日：2015-10-07

申请号：EP13795747.8

申请日：2013-11-25

Applicant: ASML Netherlands B.V.

Inventor： VAN DER WAL, Marinus, Maria, Johannes ,  AANGENENT, Wilhelmus, Henricus, Theodorus, Maria ,  KAMIDI, Ramidin, Izair ,  MANSSOURI, Khalid

IPC: G03F7/20

CPC classification number: G03F7/70725 ,  G03F7/70341 ,  G03F7/70758 ,  G03F7/70783

Abstract: A lithographic apparatus including: an object having compliant dynamics; a plurality of actuators configured to act on the driven object, wherein the plurality of actuators are over- determined in an actuator degree of freedom; a control system including a transformation matrix configured to generate controller output signals for each of the plurality of actuators in response to a sequence of setpoints, wherein the transformation matrix is configured such that the controller output signals do not excite the compliant dynamics of the object in at least one degree of freedom.

Abstract translation: 光刻设备包括具有柔顺动力学的被驱动物体; 多个致动器，被配置为作用在从动对象上，其中所述多个致动器在致动器自由度中被过度确定; 控制系统，包括变换矩阵，其被配置为响应于设定点为所述多个致动器中的每一个生成控制器输出信号，其中所述变换矩阵被配置为使得所述控制器输出信号不激励所述被驱动对象的顺应动态 至少一个自由度。

公开(公告)号：EP4394502A1

公开(公告)日：2024-07-03

申请号：EP22216697.7

申请日：2022-12-27

Applicant: ASML Netherlands B.V.

Inventor： BUTLER, Hans ,  KAMIDI, Ramidin, Izair

IPC: G03F7/00 ,  G05B19/416

CPC classification number: G03F7/70725

Abstract: The invention provides a method to generate an acceleration setpoint profile for a movable object, wherein the method comprises:
providing a time domain acceleration curve with finite acceleration time length, providing a time domain jerk curve with finite jerk time length,
calculating a time domain convolution of the time domain acceleration curve and the time domain jerk curve to generate the acceleration setpoint profile,
wherein the time domain jerk curve has a zero value at a start and an end of the finite jerk time length, and
wherein an amplitude profile of the time domain jerk curve, when Fourier transformed into frequency domain, has an amplitude that decreases for higher frequencies with at least 60 dB per decade.