公开(公告)号：WO2022128374A1

公开(公告)日：2022-06-23

申请号：PCT/EP2021/082773

申请日：2021-11-24

Applicant: ASML NETHERLANDS B.V.

Inventor： LIANG, Haoyi ,  MA, Bing ,  CHEN, Zhichao ,  KEA, Marc, Jurian

IPC: G03F7/20 ,  G01N21/956 ,  G06T7/00 ,  G06V10/24

Abstract: Systems and methods of image alignment are disclosed herein. The method of image alignment may comprise obtaining an image of a sample, obtaining information associated with a corresponding reference image, generating a modified rendered image by blurring a rendered image of the corresponding reference image such that a topology of the rendered image is substantially preserved, wherein a degree of blurring is based on a characteristic of the topology, and aligning the image of the sample with the blurred rendered image. The method may further comprise aligning the image of the sample with the corresponding reference image based on an alignment between the image of the sample and the blurred rendered image.

公开(公告)号：EP4264373A1

公开(公告)日：2023-10-25

申请号：EP21819114.6

申请日：2021-11-24

Applicant: ASML Netherlands B.V.

Inventor： LIANG, Haoyi ,  MA, Bing ,  CHEN, Zhichao ,  KEA, Marc, Jurian

IPC: G03F7/20 ,  G01N21/956 ,  G06T7/00 ,  G06V10/24