公开(公告)号：WO2014154428A2

公开(公告)日：2014-10-02

申请号：PCT/EP2014/053700

申请日：2014-02-26

Applicant: ASML NETHERLANDS B.V.

Inventor： LAFARRE, Raymond ,  ACHANTA, Satish ,  FILIPPI, Matteo ,  KARADE, Yogesh ,  NELLISSEN, Antonius ,  VAN DER WILK, Ronald ,  VAN DOREMALEN, Hendrikus, Christoffel, Maria ,  WELTERS, Wilhelmus

IPC: G03F7/20

CPC classification number: G03F7/70716 ,  G03F7/70708

Abstract: A method of manufacturing an object holder for use in a lithographic apparatus, the object holder comprising one or more electrically functional components, the method comprising: using a composite structure comprising a carrier sheet different from a main body of the object holder and a layered structure comprising one or a plurality of layers and formed on the carrier sheet; connecting the composite structure to a surface of the main body such that the layered structure is between the carrier sheet and the surface of the main body; and removing the carrier sheet from the composite structure, leaving the layered structure connected to the main body.

Abstract translation: 一种制造用于光刻设备的物体保持器的方法，所述物体保持器包括一个或多个电功能部件，所述方法包括：使用包括与所述物体保持器的主体不同的载体片的复合结构和层状结构 包括一个或多个层并形成在载体片上; 将复合结构连接到主体的表面，使得层状结构位于载体片和主体的表面之间; 并从复合结构中移除载体片，使分层结构连接到主体。

公开(公告)号：EP2979135B1

公开(公告)日：2019-11-13

申请号：EP14708521.1

申请日：2014-02-26

Applicant: ASML Netherlands B.V.

Inventor： LAFARRE, Raymond ,  ACHANTA, Satish ,  FILIPPI, Matteo ,  KARADE, Yogesh ,  NELLISSEN, Antonius ,  VAN DER WILK, Ronald ,  VAN DOREMALEN, Hendrikus, Christoffel, Maria ,  WELTERS, Wilhelmus

IPC: G03F7/20

公开(公告)号：EP2979135A2

公开(公告)日：2016-02-03

申请号：EP14708521.1

申请日：2014-02-26

Applicant: ASML Netherlands B.V.

Inventor： LAFARRE, Raymond ,  ACHANTA, Satish ,  FILIPPI, Matteo ,  KARADE, Yogesh ,  NELLISSEN, Antonius ,  VAN DER WILK, Ronald ,  VAN DOREMALEN, Hendrikus, Christoffel, Maria ,  WELTERS, Wilhelmus

IPC: G03F7/20

CPC classification number: G03F7/70716 ,  G03F7/70708

Abstract: A method of manufacturing an object holder for use in a lithographic apparatus, the object holder including one or more electrically functional components, the method including: using a composite structure including a carrier sheet different from a main body of the object holder and a layered structure including one or a plurality of layers and formed on the carrier sheet; connecting the composite structure to a surface of the main body such that the layered structure is between the carrier sheet and the surface of the main body; and removing the carrier sheet from the composite structure, leaving the layered structure connected to the main body.

Abstract translation: 制造对象保持器中的一种用于在光刻设备中使用的方法，所述对象保持器包括一个或多个电功能的部件，所述方法包括：使用复合结构，其包括载体片材从所述对象保持器的主体和层状结构的不同 包括一个或层上的多个和形成在载体片材上; 该复合结构连接到检查的主体的表面上未发现分层结构是所述载体片材和所述主体的所述表面之间; 及从该复合结构体的载体片材，留下连接到所述主体上的层状结构。