公开(公告)号：WO2013156236A1

公开(公告)日：2013-10-24

申请号：PCT/EP2013/055597

申请日：2013-03-19

Applicant: ASML NETHERLANDS B.V.

Inventor： LAFARRE, Raymond ,  DZIOMKINA, Nina ,  KARADE, Yogesh ,  RODENBURG, Elisabeth ,  SINGH, Harmeet

IPC: G03F7/20

CPC classification number: G03F7/70733 ,  G03F7/70341 ,  G03F7/70708 ,  H01L21/6831 ,  H01L21/6875

Abstract: A substrate holder for use in a lithographic apparatus, the substrate holder including: a main body (100) having a surface (107); a plurality of burls (106) projecting from the surface and having end surfaces to support a substrate; and a thin film stack (200) on the main body surface and forming an electric component, the thin film stack having a conductive layer (108) configured to distribute electrical charge substantially uniformly throughout a plane of the stack in which the conductive layer is positioned.

Abstract translation: 一种用于光刻设备的衬底保持器，所述衬底保持器包括：具有表面（107）的主体（100）; 从所述表面突出并具有支撑基板的端面的多个毛刺（106）; 以及在所述主体表面上的薄膜叠层（200），并且形成电气部件，所述薄膜叠层具有导电层（108），所述导电层被配置成基本上均匀地分布在所述堆叠的平面内的导电层所位于的平面上 。

公开(公告)号：WO2014154428A2

公开(公告)日：2014-10-02

申请号：PCT/EP2014/053700

申请日：2014-02-26

Applicant: ASML NETHERLANDS B.V.

Inventor： LAFARRE, Raymond ,  ACHANTA, Satish ,  FILIPPI, Matteo ,  KARADE, Yogesh ,  NELLISSEN, Antonius ,  VAN DER WILK, Ronald ,  VAN DOREMALEN, Hendrikus, Christoffel, Maria ,  WELTERS, Wilhelmus

IPC: G03F7/20

CPC classification number: G03F7/70716 ,  G03F7/70708

Abstract: A method of manufacturing an object holder for use in a lithographic apparatus, the object holder comprising one or more electrically functional components, the method comprising: using a composite structure comprising a carrier sheet different from a main body of the object holder and a layered structure comprising one or a plurality of layers and formed on the carrier sheet; connecting the composite structure to a surface of the main body such that the layered structure is between the carrier sheet and the surface of the main body; and removing the carrier sheet from the composite structure, leaving the layered structure connected to the main body.

Abstract translation: 一种制造用于光刻设备的物体保持器的方法，所述物体保持器包括一个或多个电功能部件，所述方法包括：使用包括与所述物体保持器的主体不同的载体片的复合结构和层状结构 包括一个或多个层并形成在载体片上; 将复合结构连接到主体的表面，使得层状结构位于载体片和主体的表面之间; 并从复合结构中移除载体片，使分层结构连接到主体。

公开(公告)号：WO2013113569A1

公开(公告)日：2013-08-08

申请号：PCT/EP2013/050826

申请日：2013-01-17

Applicant: ASML NETHERLANDS B.V.

Inventor： LAFARRE, Raymond ,  DONDERS, Sjoerd ,  TEN KATE, Nicolaas ,  DZIOMKINA, Nina ,  KARADE, Yogesh ,  RODENBURG, Elisabeth

IPC: G03F7/20

CPC classification number: B22F7/062 ,  B05D3/06 ,  B05D5/00 ,  B22F3/1055 ,  B23K26/0081 ,  B23K26/342 ,  B23Q3/18 ,  B33Y10/00 ,  B33Y80/00 ,  G03F7/20 ,  G03F7/70341 ,  G03F7/70416 ,  G03F7/707 ,  G03F7/70708 ,  G03F7/70716 ,  G03F7/70733 ,  G03F7/708

Abstract: An object holder (100) for a lithographic apparatus has a main body (400) having a surface (400a). A plurality of burls (406) to support an object are formed on the surface or in apertures of a thin-film stack (410, 440, 450). At least one of the burls is formed by laser-sintering. At least one of the burls formed by laser-sintering may be a repair of a damaged burl previously formed by laser-sintering or another method.

Abstract translation: 用于光刻设备的物体保持器（100）具有具有表面（400a）的主体（400）。 在薄膜堆叠（410,440,450）的表面上或孔中形成有用于支撑物体的多个毛刺（406）。 通过激光烧结形成至少一个毛刺。 通过激光烧结形成的毛刺中的至少一个可以是先前通过激光烧结形成的损伤的隆起的修复或其他方法。

公开(公告)号：WO2013113568A2

公开(公告)日：2013-08-08

申请号：PCT/EP2013/050818

申请日：2013-01-17

Applicant: ASML NETHERLANDS B.V.

Inventor： LAFARRE, Raymond ,  DONDERS, Sjoerd ,  TEN KATE, Nicolaas ,  DZIOMKINA, Nina ,  KARADE, Yogesh ,  RODENBURG, Elisabeth

IPC: G03F7/20

CPC classification number: B22F7/062 ,  B05D3/06 ,  B05D5/00 ,  B22F3/1055 ,  B23K26/0081 ,  B23K26/342 ,  B23Q3/18 ,  B33Y10/00 ,  B33Y80/00 ,  G03F7/20 ,  G03F7/70341 ,  G03F7/70416 ,  G03F7/707 ,  G03F7/70708 ,  G03F7/70716 ,  G03F7/70733 ,  G03F7/708

Abstract: A substrate holder for a lithographic apparatus has a main body having a thin-film stack provided on a surface thereof. The thin-film stack forms an electronic or electric component such as an electrode, a sensor, a heater, a transistor or a logic device, and has a top isolation layer. A plurality of burls to support a substrate are formed on the thin-film stack or in apertures of the thin-film stack.

Abstract translation: 用于光刻设备的衬底保持器具有设置在其表面上的薄膜堆叠的主体。 薄膜堆叠形成诸如电极，传感器，加热器，晶体管或逻辑器件的电子或电气部件，并且具有顶部隔离层。 在薄膜叠层或薄膜叠层的孔中形成有用于支撑衬底的多个毛刺。

公开(公告)号：EP2979135B1

公开(公告)日：2019-11-13

申请号：EP14708521.1

申请日：2014-02-26

Applicant: ASML Netherlands B.V.

Inventor： LAFARRE, Raymond ,  ACHANTA, Satish ,  FILIPPI, Matteo ,  KARADE, Yogesh ,  NELLISSEN, Antonius ,  VAN DER WILK, Ronald ,  VAN DOREMALEN, Hendrikus, Christoffel, Maria ,  WELTERS, Wilhelmus

IPC: G03F7/20

公开(公告)号：EP2810128B1

公开(公告)日：2019-10-02

申请号：EP13700893.4

申请日：2013-01-17

Applicant: ASML Netherlands B.V.

Inventor： LAFARRE, Raymond ,  DONDERS, Sjoerd ,  TEN KATE, Nicolaas ,  DZIOMKINA, Nina ,  KARADE, Yogesh ,  RODENBURG, Elisabeth

IPC: G03F7/20

公开(公告)号：EP2839342A1

公开(公告)日：2015-02-25

申请号：EP13711622.4

申请日：2013-03-19

Applicant: ASML Netherlands B.V.

Inventor： LAFARRE, Raymond ,  DZIOMKINA, Nina ,  KARADE, Yogesh ,  RODENBURG, Elisabeth ,  SINGH, Harmeet

IPC: G03F7/20

CPC classification number: G03F7/70733 ,  G03F7/70341 ,  G03F7/70708 ,  H01L21/6831 ,  H01L21/6875

Abstract: A substrate holder for use in a lithographic apparatus, the substrate holder including: a main body (100) having a surface (107); a plurality of burls (106) projecting from the surface and having end surfaces to support a substrate; and a thin film stack (200) on the main body surface and forming an electric component, the thin film stack having a conductive layer (108) configured to distribute electrical charge substantially uniformly throughout a plane of the stack in which the conductive layer is positioned.

公开(公告)号：EP2810127B1

公开(公告)日：2020-03-04

申请号：EP13700401.6

申请日：2013-01-17

Applicant: ASML Netherlands B.V.

Inventor： LAFARRE, Raymond ,  DONDERS, Sjoerd ,  TEN KATE, Nicolaas ,  DZIOMKINA, Nina ,  KARADE, Yogesh ,  RODENBURG, Elisabeth

IPC: G03F7/20

公开(公告)号：EP2810128A2

公开(公告)日：2014-12-10

申请号：EP13700893.4

申请日：2013-01-17

Applicant: ASML Netherlands B.V.

Inventor： LAFARRE, Raymond ,  DONDERS, Sjoerd ,  TEN KATE, Nicolaas ,  DZIOMKINA, Nina ,  KARADE, Yogesh ,  RODENBURG, Elisabeth

IPC: G03F7/20

CPC classification number: B22F7/062 ,  B05D3/06 ,  B05D5/00 ,  B22F3/1055 ,  B23K26/342 ,  B23K26/354 ,  B23Q3/18 ,  B33Y10/00 ,  B33Y80/00 ,  G03F7/20 ,  G03F7/70341 ,  G03F7/70416 ,  G03F7/707 ,  G03F7/70708 ,  G03F7/70716 ,  G03F7/70733 ,  G03F7/708

Abstract: An object holder (100) for a lithographic apparatus has a main body (400) having a surface (400a). A plurality of burls (406) to support an object are formed on the surface or in apertures of a thin-film stack (410, 440, 450). At least one of the burls is formed by laser-sintering. At least one of the burls formed by laser-sintering may be a repair of a damaged burl previously formed by laser-sintering or another method.

Abstract translation: 用于光刻设备的物体保持器具有具有表面的主体。 在薄膜叠层的表面或孔中形成有用于支撑物体的多个毛刺。 通过激光烧结形成至少一个毛刺。 通过激光烧结形成的毛刺中的至少一个可以是先前通过激光烧结形成的损伤的隆起的另一种方法的修复。

公开(公告)号：EP2979135A2

公开(公告)日：2016-02-03

申请号：EP14708521.1

申请日：2014-02-26

Applicant: ASML Netherlands B.V.

Inventor： LAFARRE, Raymond ,  ACHANTA, Satish ,  FILIPPI, Matteo ,  KARADE, Yogesh ,  NELLISSEN, Antonius ,  VAN DER WILK, Ronald ,  VAN DOREMALEN, Hendrikus, Christoffel, Maria ,  WELTERS, Wilhelmus

IPC: G03F7/20

CPC classification number: G03F7/70716 ,  G03F7/70708

Abstract: A method of manufacturing an object holder for use in a lithographic apparatus, the object holder including one or more electrically functional components, the method including: using a composite structure including a carrier sheet different from a main body of the object holder and a layered structure including one or a plurality of layers and formed on the carrier sheet; connecting the composite structure to a surface of the main body such that the layered structure is between the carrier sheet and the surface of the main body; and removing the carrier sheet from the composite structure, leaving the layered structure connected to the main body.

Abstract translation: 制造对象保持器中的一种用于在光刻设备中使用的方法，所述对象保持器包括一个或多个电功能的部件，所述方法包括：使用复合结构，其包括载体片材从所述对象保持器的主体和层状结构的不同 包括一个或层上的多个和形成在载体片材上; 该复合结构连接到检查的主体的表面上未发现分层结构是所述载体片材和所述主体的所述表面之间; 及从该复合结构体的载体片材，留下连接到所述主体上的层状结构。