公开(公告)号：WO2016023740A2

公开(公告)日：2016-02-18

申请号：PCT/EP2015/067159

申请日：2015-07-27

Applicant: ASML NETHERLANDS B.V.

Inventor： NIKIPELOV, Andrey, Alexandrovich ,  COENEN, Teis, Johan ,  VAN HELVOORT, Jeroen, Johannes, Michiel ,  ENGELEN, Wouter, Joep ,  BRUSSAARD, Gerrit, Jacobus, Hendrik ,  POORTER, Gijsbertus, Geert ,  LOOPSTRA, Erik, Roelof

IPC: H01S3/09

CPC classification number: H01S3/0903 ,  H01S3/0071 ,  H01S3/0959 ,  H01S3/1024 ,  H01S3/11 ,  H01S3/1103

Abstract: Passage through LINACs of electron bunches in their acceleration phase is co-ordinated with passage through the LINACs of electron bunches in their deceleration phase. Each successive pair of electron bunches are spaced in time by a respective bunch spacing, in accordance with a repeating electron bunch sequence. The electron source provides clearing gaps in the electron bunch sequence to allow clearing of ions at the undulator. The electron source provides the clearing gaps in accordance with a clearing gap sequence such that, for each of the plurality of energy recovery LINACS, and for substantially all of the clearing gaps:- for each passage of the clearing gap through the LINAC in an acceleration phase or deceleration phase the clearing gap is co-ordinated with a further one of the clearing gaps passing through the LINAC in a deceleration phase or acceleration phase thereby to maintain energy recovery operation of the LINAC.

Abstract translation: 在加速阶段通过电子束的LINAC通道在其减速阶段通过电子束的LINAC进行协调。 根据重复的电子束序列，每个连续的一对电子束在时间上由相应的束间隔隔开。 电子源提供电子束序列中的清除间隙，以允许在波动器处清除离子。 电子源根据清除间隙序列提供清除间隙，使得对于多个能量回收LINACS中的每一个以及基本上所有的清除间隙： - 对于通过加速度的LINAC的清除间隙的每次通过 相位或减速阶段，清除间隙与在减速阶段或加速阶段通过LINAC的另一个清除间隙进行协调，从而保持LINAC的能量回收操作。

公开(公告)号：WO2018065195A1

公开(公告)日：2018-04-12

申请号：PCT/EP2017/073437

申请日：2017-09-18

Applicant: ASML NETHERLANDS B.V.

Inventor： KLUNDER, Roelof, Harm ,  POORTER, Gijsbertus, Geert ,  VAN DEN HOMBERG, Johannes, Aldegonda, Theodorus, Marie

IPC: H05H7/06 ,  H05H7/00 ,  H05H9/00 ,  G01T1/29

Abstract: An electron beam transport system for controlling the position of two different electron beams comprises: a main electron beam transport module; a first input electron beam transport module; a second input electron beam transport module; and a controller. The main electron beam transport module comprises a beam monitoring device disposed at a measurement position. The first input electron beam transport module comprises a first actuator for applying a perturbation to a transverse position of a first electron beam at a first actuation point. The second input electron beam transport module comprises a second actuator for applying a perturbation to a transverse position of a second electron beam at a second actuation point. The controller is operable to receive a signal from the beam monitoring device and to send control signals to the first actuator and the second actuator. The controller is operable to determine a first quantity indicative of a difference in a transverse position of the first and second electron beams and a second quantity indicative of an average transverse position of the first and second electron beams. The controller is further operable to control the trajectories of the first and second electron beams independently by implementing a first control loop that iteratively attempts to reduce the first quantity by using the first actuator to perturb a trajectory of the first electron beam, and a second control loop that iteratively perturbs a trajectory of the second electron beam using the second actuator such that the average transverse position of the two different electron beams moves towards a desired transverse position.

Abstract translation: 用于控制两个不同电子束位置的电子束传输系统包括：主电子束传输模块; 第一输入电子束传输模块; 第二输入电子束传输模块; 和一个控制器。 主电子束传输模块包括布置在测量位置处的射束监测装置。 第一输入电子束传输模块包括第一致动器，用于在第一致动点对第一电子束的横向位置施加扰动。 第二输入电子束传输模块包括第二致动器，用于在第二致动点对第二电子束的横向位置施加扰动。 控制器可操作以接收来自射束监测装置的信号并将控制信号发送到第一致动器和第二致动器。 控制器可操作以确定指示第一和第二电子束的横向位置的差的第一数量和指示第一和第二电子束的平均横向位置的第二数量。 控制器进一步可操作以通过实施第一控制回路独立地控制第一和第二电子束的轨迹，第一控制回路通过使用第一致动器扰动第一电子束的轨迹来迭代地尝试减少第一量，并且第二控制器 其使用第二致动器迭代地扰动第二电子束的轨迹，使得两个不同电子束的平均横向位置朝向期望的横向位置移动。