公开(公告)号：WO2023016738A1

公开(公告)日：2023-02-16

申请号：PCT/EP2022/069567

申请日：2022-07-13

Applicant: ASML NETHERLANDS B.V.

Inventor： GUAN, Tiannan ,  HUANG, Zhuangxiong ,  ENGELEN, Johannes, Bernardus, Charles ,  NAKIBOGLU, Günes ,  KRUIZINGA, Matthias ,  VAN GILS, Petrus, Jacobus, Maria ,  TRALLI, Aldo ,  DE VRIES, Sjoerd, Frans ,  TEUNISSEN, Marcel, Maria, Cornelius, Franciscus ,  BRULS, Richard, Joseph ,  VAN DER MEULEN, Frits

IPC: G03F7/20 ,  H01L21/683

Abstract: The invention relates to an electrostatic holder comprising: a body, and a clamping element attached to the body, said clamping element comprising an electrode for applying an attractive force between the clamping element and a first to be clamped object, wherein an outer edge of the body is configured to provide a gap between the outer edge of the body and the first to be clamped object, which gap is configured for outputting a fluid for reducing dust particles reaching the first to be clamped object or a second to be clamped object on an opposite side of the holder.

公开(公告)号：EP4134748A1

公开(公告)日：2023-02-15

申请号：EP21191135.9

申请日：2021-08-12

Applicant: ASML Netherlands B.V.

Inventor： HUANG, Zhuangxiong ,  GUAN, Tiannan ,  ENGELEN, Johannes, Bernardus, Charles ,  NAKIBOGLU, Günes ,  KRUIZINGA, Matthias ,  VAN GILS, Petrus, Jacobus, Maria ,  TRALLI, Aldo ,  DE VRIES, Sjoerd, Frans ,  TEUNISSEN, Marcel, Maria, Cornelius, Franciscus ,  BRULS, Richard, Joseph ,  VAN DER MEULEN, Frits

IPC: G03F7/20 ,  H01L21/683

Abstract: The invention relates to an electrostatic holder comprising:
- a body, and
- a clamping element attached to the body, said clamping element comprising an electrode for applying an attractive force between the clamping element and a first to be clamped object,
wherein an outer edge of the body is configured to provide a gap between the outer edge of the body and the first to be clamped object, which gap is configured for outputting a fluid for reducing dust particles reaching the first to be clamped object or a second to be clamped object on an opposite side of the holder.

公开(公告)号：EP4227738A1

公开(公告)日：2023-08-16

申请号：EP22156582.3

申请日：2022-02-14

Applicant: ASML Netherlands B.V.

Inventor： MEISSNER, Torsten ,  HUANG, Zhuangxiong ,  TRALLI, Aldo

IPC: G03F7/20 ,  H01L21/67 ,  H01L21/683

Abstract: A support for supporting a partial or complete clamp during manufacture of the clamp, wherein the support comprises a raised flexible element located on a top surface, the flexible element being configured to deform as a result of a gas pressure differential acting on the flexible element to create gas flow restriction between a space between the clamp and the support, and a space outside the clamp.

公开(公告)号：EP4321934A1

公开(公告)日：2024-02-14

申请号：EP22189906.5

申请日：2022-08-11

Applicant: ASML Netherlands B.V.

Inventor： HUANG, Zhuangxiong ,  TRALLI, Aldo ,  JILISEN, Reinier, Theodorus, Martinus ,  MERKX, Maarten, Anton, Gertruda

IPC: G03F7/20 ,  H05G2/00

Abstract: There is provided a fluid dispensing system including a fluid-permeable surface having a pre-defined permeability to allow permeation of a fluid, and a controller configured to control the rate of permeation of the fluid into a volume by controlling one or both of a pressure of the fluid and an exposed surface area of the fluid-permeable surface. Also provided is a method of controlling the dispensing of a fluid, a plasma-generating apparatus including such a fluid dispensing system as well as the use of such a system, method, or apparatus in a lithographic apparatus or process.