公开(公告)号：WO2022258271A1

公开(公告)日：2022-12-15

申请号：PCT/EP2022/062443

申请日：2022-05-09

Applicant: ASML NETHERLANDS B.V.

Inventor： VAN SOEST, Jurgen ,  VEENSTRA, Roy, Ramon ,  SMAKMAN, Erwin, Paul ,  VAN ZUTPHEN, Tom ,  MANGNUS, Albertus, Victor, Gerardus

IPC: H01J37/073

Abstract: The disclosure relates to a charged particle beam apparatus configured to project charged particle beams towards a sample. The charged particle beam apparatus comprises: a plurality of charged particle-optical columns configured to project respective charged particle beams towards the sample, wherein each charged particle-optical column comprises: a charged particle source configured to emit the charged particle beam towards the sample, the charged particle sources being comprised in a source array; an objective lens comprising an electrostatic electrode configured to direct the charged particle beam towards the sample; and a detector associated with the objective lens array, configured to detect signal charged particles emitted from the sample. The objective lens is the most down-beam element of the charged particle-optical column configured to affect the charged particle beam directed towards the sample.

公开(公告)号：WO2016096322A1

公开(公告)日：2016-06-23

申请号：PCT/EP2015/077232

申请日：2015-11-20

Applicant: ASML NETHERLANDS B.V.

Inventor： IKKINK, Teunis ,  MERKX, Leon ,  VAN DER PUT, Jan ,  VAN ZUTPHEN, Tom ,  VREEDE, Olaf

IPC: G03F7/20 ,  G01D5/26 ,  G01D5/28 ,  G01D5/34 ,  G01D5/347 ,  G01B11/00

CPC classification number: G03F7/70775 ,  G01D5/268 ,  G01D5/34723 ,  G03F7/70833

Abstract: An optical encoder system (200) comprises a radiation source (20), an encoder head (22), a scale (24) and an optical fiber (26). The radiation source is arranged to generate a radiation beam (28). The encoder head has a splitting element for splitting the radiation beam into split radiation beams (210a, 210b). The scale is arranged to receive at least one of the split radiation beams. The optical fiber is arranged to propagate the radiation beam at least partly between the radiation source and the splitting element. The optical fiber is a single-polarization fiber.

Abstract translation: 光学编码器系统（200）包括辐射源（20），编码器头（22），标尺（24）和光纤（26）。 辐射源被布置成产生辐射束（28）。 编码器头具有用于将辐射束分成分裂的辐射束（210a，210b）的分离元件。 刻度尺被布置成接收至少一个分离的辐射束。 光纤布置成至少部分地在辐射源和分离元件之间传播辐射束。 光纤是单偏振光纤。

公开(公告)号：EP4352773A1

公开(公告)日：2024-04-17

申请号：EP22728202.7

申请日：2022-05-09

Applicant: ASML Netherlands B.V.

Inventor： VAN SOEST, Jurgen ,  VEENSTRA, Roy, Ramon ,  SMAKMAN, Erwin, Paul ,  VAN ZUTPHEN, Tom ,  MANGNUS, Albertus, Victor, Gerardus

IPC: H01J37/073

CPC classification number: H01J37/073 ,  H01J2237/063520130101 ,  H01J2237/281720130101 ,  H01J2237/3177420130101

公开(公告)号：EP4102535A1

公开(公告)日：2022-12-14

申请号：EP21178234.7

申请日：2021-06-08

Applicant: ASML Netherlands B.V.

Inventor： VAN SOEST, Jurgen ,  VEENSTRA, Roy Ramon ,  SMAKMAN, Erwin Paul ,  VAN ZUTPHEN, Tom ,  MANGNUS, Albertus Victor Gerardus

IPC: H01J37/073

Abstract: The disclosure relates to a charged particle beam apparatus configured to project charged particle beams towards a sample. The charged particle beam apparatus comprises: a plurality of charged particle-optical columns configured to project respective charged particle beams towards the sample, wherein each charged particle-optical column comprises: a charged particle source configured to emit the charged particle beam towards the sample, the charged particle sources being comprised in a source array; an objective lens comprising an electrostatic electrode configured to direct the charged particle beam towards the sample; and a detector associated with the objective lens array, configured to detect signal charged particles emitted from the sample. The objective lens is the most down-beam element of the charged particle-optical column configured to affect the charged particle beam directed towards the sample.