公开(公告)号：WO2020043401A1

公开(公告)日：2020-03-05

申请号：PCT/EP2019/070104

申请日：2019-07-25

Applicant: ASML NETHERLANDS B.V.

Inventor： FISCHER, Olof, Martinus, Josephus ,  BUTLER, Hans ,  KIMMAN, Maarten, Hartger ,  ROVERS, Johannes, Marinus, Maria ,  YANG, Tao

IPC: H02K41/035 ,  G03F7/20

Abstract: The invention provides an electromagnetic actuator comprising: - a first member and a second member configured to co-operate with the first member to, in use, generate a force in a first direction; - the first member comprising a permanent magnet assembly and a first magnetic member, the permanent magnet and the first magnetic member forming a first magnetic circuit having a first gap; - the second member comprising a coil member configured to, in use, be arranged at least partly inside the first gap, and, when energized, generated an electromagnetic force in the first direction; - the second member further comprising a second magnetic member, the permanent magnet assembly, the first magnetic member and the second magnetic member forming a second magnetic circuit having a second gap, the second magnetic circuit being configured to, in use, generate a reluctance force in the first direction.