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    POSITIONING SYSTEM FOR A LITHOGRAPHIC APPARATUS
    1.
    发明申请
    POSITIONING SYSTEM FOR A LITHOGRAPHIC APPARATUS 审中-公开

    公开(公告)号：WO2019170379A1

    公开(公告)日：2019-09-12

    申请号：PCT/EP2019/053613

    申请日：2019-02-14

    Applicant: ASML NETHERLANDS B.V. ,  CARL ZEISS SMT GMBH

    Inventor： KIMMAN, Maarten, Hartger ,  WESSELINGH, Jasper

    IPC: G03F7/20 ,  H02K41/03 ,  H02K41/035

    Abstract: A positioning system to position a structure comprises an actuator and a control unit to control the actuator in response to a position setpoint received by the control unit. The actuator comprises a magnet assembly comprises a magnet configured to provide a magnetic flux, and a coil assembly, wherein the coil assembly and the magnet assembly are movable relative to each other, the coil assembly comprising a coil, an actuation of the coil by a drive current providing for a force between the magnet assembly and the coil assembly. The magnet assembly comprises a further electric conductor, the further electric conductor comprising a non-ferromagnetic electrically conductive material, wherein the further electric conductor is magnetically coupled to the coil of the coil assembly and forms a short circuit path for an inductive electrical current induced in the further electric conductor as a result of an actuator current in the coil.

    MULTIPHASE LINEAR MOTOR, MULTIPHASE PLANAR MOTOR, STAGE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    2.
    发明申请
    MULTIPHASE LINEAR MOTOR, MULTIPHASE PLANAR MOTOR, STAGE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD 审中-公开
    多相线性电动机，多相平面电动机，级，光刻设备和器件制造方法

    公开(公告)号：WO2017137181A1

    公开(公告)日：2017-08-17

    申请号：PCT/EP2017/050199

    申请日：2017-01-05

    Applicant: ASML NETHERLANDS B.V.

    Inventor： KIMMAN, Maarten, Hartger ,  BRAAKSMA, Dave ,  HEIJMANS, Peter, Michel, Silvester, Maria ,  HOOGENDAM, Christiaan, Alexander

    IPC: H02K41/03 ,  H02K3/28 ,  H02K29/03 ,  H02K7/09

    CPC classification number: H02K41/031 ,  H02K3/28 ,  H02K7/09 ,  H02K29/03 ,  H02K2201/18 ,  H02K2213/03

    Abstract: An electromagnetic motor is described, the electromagnetic motor comprising: a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction; a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.

    Abstract translation: 描述了一种电磁电动机，所述电磁电动机包括：磁体组件，所述磁体组件被配置为产生具有沿第一方向的节距Pm1和沿第二方向的节距Pm2的二维交变磁场; 线圈组件，所述线圈组件被配置为与所述磁体组件协作以在所述第一方向上产生第一力并且在所述第二方向上产生第二力，其中所述线圈组件包括第一线圈组，所述第一线圈组包括用于产生所述第一力的多个第一线圈 以及第二线圈组，其包括用于产生第二力的多个第二线圈，其中第一方向上的第一线圈组中的线圈节距Pc1与第一方向上的线圈节距Pc1之比R1与第一方向上的线圈节距Pc2之比R1 第二个线圈设置在第二个方向上超过Pm2。

    ELECTROMAGNETIC ACTUATOR, POSITION CONTROL SYSTEM AND LITHOGRAPHIC APPARATUS
    3.
    发明申请
    ELECTROMAGNETIC ACTUATOR, POSITION CONTROL SYSTEM AND LITHOGRAPHIC APPARATUS 审中-公开

    公开(公告)号：WO2020043401A1

    公开(公告)日：2020-03-05

    申请号：PCT/EP2019/070104

    申请日：2019-07-25

    Applicant: ASML NETHERLANDS B.V.

    Inventor： FISCHER, Olof, Martinus, Josephus ,  BUTLER, Hans ,  KIMMAN, Maarten, Hartger ,  ROVERS, Johannes, Marinus, Maria ,  YANG, Tao

    IPC: H02K41/035 ,  G03F7/20

    Abstract: The invention provides an electromagnetic actuator comprising: - a first member and a second member configured to co-operate with the first member to, in use, generate a force in a first direction; - the first member comprising a permanent magnet assembly and a first magnetic member, the permanent magnet and the first magnetic member forming a first magnetic circuit having a first gap; - the second member comprising a coil member configured to, in use, be arranged at least partly inside the first gap, and, when energized, generated an electromagnetic force in the first direction; - the second member further comprising a second magnetic member, the permanent magnet assembly, the first magnetic member and the second magnetic member forming a second magnetic circuit having a second gap, the second magnetic circuit being configured to, in use, generate a reluctance force in the first direction.

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