公开(公告)号：NL2002789A1

公开(公告)日：2009-10-27

申请号：NL2002789

申请日：2009-04-24

Applicant: ASML NETHERLANDS BV

Inventor： VERVOORDELDONK MICHAEL JOHANNES ,  BAGGEN MARK CONSTANT JOHANNES

IPC: H01L21/68 ,  G03F9/00

公开(公告)号：NL1036662A1

公开(公告)日：2009-10-09

申请号：NL1036662

申请日：2009-03-04

Applicant: ASML NETHERLANDS BV

Inventor： KAMIDI RAMIDIN IZAIR ,  COX HENRIKUS HERMAN MARIE ,  EUSSEN EMIEL JOZEF MELANIE ,  KUNST RONALD CASPER ,  PASCH ENGELBERTUS ANTONIUS FRANSISCUS VAN DER ,  HEERTJES MARCEL FRANCOIS ,  BAGGEN MARK CONSTANT JOHANNES

IPC: H01L21/68 ,  G03F9/00

公开(公告)号：SG145645A1

公开(公告)日：2008-09-29

申请号：SG2008012049

申请日：2008-02-13

Applicant: ASML NETHERLANDS BV

Inventor： BAGGEN MARK CONSTANT JOHANNES ,  VAN DEN BIGGELAAR PETRUS MARINUS CHRISTIANUS ,  TIM TSO YIN ,  HEERTJES MARCEL FRANCOIS ,  KAMIDI RAMIDIN IZAIR ,  HOUBEN DENNIS ANDREAS PETRUS HUBERTINA ,  BAGGEN CONSTANT PAUL MARIE JOZZEF ,  VAN DE MOLENGRAFT MARINUS JACOBUS GERARDUS

Abstract: LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD In a lithographic apparatus, a feedforward transfer function of a control system, is determined by : a) iteratively learning a feedforward output signal of the control system by iterative learning control for a given setpoint signal; b) determining a relation between the learned feedforward output signal and the setpoint signal; and c) applying the relation as the feedforward transfer function of the control system. A learned feedforward, which has been learned for one or more specific setpoint signals only, can be adapted to provide a setpoint signal dependent feedforward output signal. The learned feedforward can be made more robust against setpoint variations.