公开(公告)号：NL2014160A

公开(公告)日：2015-08-06

申请号：NL2014160

申请日：2015-01-20

Applicant: ASML NETHERLANDS BV

Inventor： AANGENENT WILHELMUS HENRICUS THEODORUS MARIA ,  KOORNEEF LUCAS FRANCISCUS ,  RUIJL THEO ANJES MARIA ,  BERG STANLEY CONSTANT JOHANNES MARTINUS ,  MEULEN STAN HENRICUS ,  EIJK JAN ,  WULLMS PIETER HUBERTUS GODEFRIDA ,  LIESHOUT RICHARD HENRICUS ADRIANUS

IPC: G03F7/20 ,  H01L21/68

Abstract: A stage positioning system, includes a first body, a second body and a coupling arranged to couple the first body and the second body to each other. The coupling includes a visco-elastic element arranged to couple the first body and the second body to each other. The stage positioning system may further include a sensor to provide a signal representative of a position of the first body. The stage positioning system may further include an actuator to move the first body. The second body may be arranged to couple the actuator and the coupling to each other.