Patent search ap:("ASML NETHERLANDS BV") AND inv:"BRUIN MAIKEL" Page 1

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发明专利
LEAF SPRING, STAGE SYSTEM, AND LITHOGRAPHIC APPARATUS. 未知

公开(公告)号：NL2007451A

公开(公告)日：2012-05-01

申请号：NL2007451

申请日：2011-09-21

Applicant: ASML NETHERLANDS BV

Inventor： HOOGENDAM CHRISTIAAN , CUIJPERS MARTINUS , RIEDSTRA BART , GIJZEN RONALD , BRUIN MAIKEL

IPC: G03F7/20 , G03F9/00 , H01L21/68

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