公开(公告)号：NL2005690A

公开(公告)日：2011-06-23

申请号：NL2005690

申请日：2010-11-15

Applicant: ASML NETHERLANDS BV

Inventor： GIJZEN RONALD ,  HOOGENDAM CHRISTIAAN ,  FRANKEN SANDER ,  BOERHOF RENE

IPC: G03F7/20

Abstract: A container is provided for use within a lithographic apparatus. The container is configured to house at least one component of the lithographic apparatus within an internal space which is at least partially filled with a packing material that includes a plurality of gas cells.

公开(公告)号：NL2007451A

公开(公告)日：2012-05-01

申请号：NL2007451

申请日：2011-09-21

Applicant: ASML NETHERLANDS BV

Inventor： HOOGENDAM CHRISTIAAN ,  CUIJPERS MARTINUS ,  RIEDSTRA BART ,  GIJZEN RONALD ,  BRUIN MAIKEL

IPC: G03F7/20 ,  G03F9/00 ,  H01L21/68