Patent search ap:("ASML NETHERLANDS BV") AND inv:"DANILIN ALEXANDER ALEXANDROVICH" Page 1

1.

发明专利
LITHOGRAPHIC CLUSTER SYSTEM, METHOD FOR CALIBRATING A POSITIONING DEVICE OF A LITHOGRAPHIC APPARATUS AND MEASUREMENT APPARATUS. 未知

公开(公告)号：NL2010971A

公开(公告)日：2014-01-13

申请号：NL2010971

申请日：2013-06-14

Applicant: ASML NETHERLANDS BV

Inventor： DANILIN ALEXANDER ALEXANDROVICH , ARRIZABALAGA ALEJANDRO XABIER , PADIY ALEXANDER VIKTOROVYCH , MENCHTCHIKOV BORIS

IPC: G03F7/20 , G03F9/00

Patent Agency Ranking