Patent search ap:("ASML NETHERLANDS BV") AND inv:"PADIY ALEXANDER VIKTOROVYCH" Page 1

1.

发明专利
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2006923A

公开(公告)日：2012-12-11

申请号：NL2006923

申请日：2011-06-09

Applicant: ASML NETHERLANDS BV

Inventor： PADIY ALEXANDER VIKTOROVYCH , MENCHTCHIKOV BORIS , MIDDLEBROOKS SCOTT

IPC: G03F7/20

2.

发明专利
LITHOGRAPHIC CLUSTER SYSTEM, METHOD FOR CALIBRATING A POSITIONING DEVICE OF A LITHOGRAPHIC APPARATUS AND MEASUREMENT APPARATUS. 未知

公开(公告)号：NL2010971A

公开(公告)日：2014-01-13

申请号：NL2010971

申请日：2013-06-14

Applicant: ASML NETHERLANDS BV

Inventor： DANILIN ALEXANDER ALEXANDROVICH , ARRIZABALAGA ALEJANDRO XABIER , PADIY ALEXANDER VIKTOROVYCH , MENCHTCHIKOV BORIS

IPC: G03F7/20 , G03F9/00

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