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公开(公告)号：NL2010527A
公开(公告)日：2014-09-30
申请号：NL2010527
申请日：2013-03-27
Applicant: ASML NETHERLANDS BV
Inventor： LAFARRE RAYMOND , NELLISSEN ANTONIUS JOHANNES MARIA , KARADE YOGESH , DOREMALEN HENDRIKUS CHRISTOFFEL MARIA , FILIPPI MATTEO
IPC: G03F7/20 , H01L21/683
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