公开(公告)号：WO2013113568A3

公开(公告)日：2013-12-12

申请号：PCT/EP2013050818

申请日：2013-01-17

Applicant: ASML NETHERLANDS BV

Inventor： LAFARRE RAYMOND ,  DONDERS SJOERD ,  TEN KATE NICOLAAS ,  DZIOMKINA NINA ,  KARADE YOGESH ,  RODENBURG ELISABETH

IPC: G03F7/20

CPC classification number: B22F7/062 ,  B05D3/06 ,  B05D5/00 ,  B22F3/1055 ,  B23K26/0081 ,  B23K26/342 ,  B23Q3/18 ,  B33Y10/00 ,  B33Y80/00 ,  G03F7/20 ,  G03F7/70341 ,  G03F7/70416 ,  G03F7/707 ,  G03F7/70708 ,  G03F7/70716 ,  G03F7/70733 ,  G03F7/708

Abstract: A substrate holder (100) for a lithographic apparatus has a main body having a thin-film stack (110) provided on a surface thereof. The thin-film stack forms an electronic or electric component such as an electrode, a sensor, a heater, a transistor or a logic device, and has a top isolation layer. A plurality of burls (106) to support a substrate (W) are formed on the thin-film stack or in apertures of the thin-film stack.

Abstract translation: 用于光刻设备的衬底保持器（100）具有在其表面上设置有薄膜叠层（110）的主体。 薄膜堆叠形成诸如电极，传感器，加热器，晶体管或逻辑器件的电子或电气部件，并且具有顶部隔离层。 在薄膜堆叠或薄膜叠层的孔中形成有用于支撑基板（W）的多个毛刺（106）。

公开(公告)号：WO2014154428A3

公开(公告)日：2014-12-18

申请号：PCT/EP2014053700

申请日：2014-02-26

Applicant: ASML NETHERLANDS BV

Inventor： LAFARRE RAYMOND ,  ACHANTA SATISH ,  FILIPPI MATTEO ,  KARADE YOGESH ,  NELLISSEN ANTONIUS ,  VAN DER WILK RONALD ,  VAN DOREMALEN HENDRIKUS CHRISTOFFEL MARIA ,  WELTERS WILHELMUS

IPC: G03F7/20

CPC classification number: G03F7/70716 ,  G03F7/70708

Abstract: A method of manufacturing an object holder (100) for use in a lithographic apparatus, the object holder comprising one or more electrically functional components, the method comprising: using a composite structure comprising a carrier sheet (20) different from a main body (100a) of the object holder and a layered structure comprising one or a plurality of layers (22) and formed on the carrier sheet; connecting the composite structure to a surface of the main body such that the layered structure is between the carrier sheet and the surface of the main body; and removing the carrier sheet from the composite structure, leaving the layered structure connected to the main body.

Abstract translation: 一种制造用于光刻设备的物体保持器（100）的方法，所述物体保持器包括一个或多个电功能部件，所述方法包括：使用复合结构，所述复合结构包括不同于主体（100a）的载体片 ）和包括一个或多个层（22）并形成在所述载体片上的层状结构; 将复合结构连接到主体的表面，使得层状结构位于载体片和主体的表面之间; 并从复合结构中移除载体片，使分层结构连接到主体。

公开(公告)号：NL2010527A

公开(公告)日：2014-09-30

申请号：NL2010527

申请日：2013-03-27

Applicant: ASML NETHERLANDS BV

Inventor： LAFARRE RAYMOND ,  NELLISSEN ANTONIUS JOHANNES MARIA ,  KARADE YOGESH ,  DOREMALEN HENDRIKUS CHRISTOFFEL MARIA ,  FILIPPI MATTEO

IPC: G03F7/20 ,  H01L21/683

公开(公告)号：NL2007768A

公开(公告)日：2012-06-18

申请号：NL2007768

申请日：2011-11-10

Applicant: ASML NETHERLANDS BV

Inventor： LAFARRE RAYMOND ,  TEN KATE NICOLAAS ,  DZIOMKINA NINA ,  KARADE YOGESH

IPC: G03F7/20 ,  H01L21/683

Abstract: A substrate holder for a lithographic apparatus has a planarization layer provided on a surface thereof. The planarization layer provides a smooth surface for the formation of an electronic component such as a thin film electronic component. The planarization layer may be provided in multiple sub layers. The planarization layer may smooth over roughness caused by removal of material from a blank to form burls on the substrate holder.

公开(公告)号：NL2010140A

公开(公告)日：2013-08-06

申请号：NL2010140

申请日：2013-01-17

Applicant: ASML NETHERLANDS BV

Inventor： LAFARRE RAYMOND ,  DONDERS SJOERD ,  KATE NICOLAAS ,  DZIOMKINA NINA ,  KARADE YOGESH ,  RODENBURG ELISABETH

IPC: G03F7/20 ,  H01L21/683

Abstract: Substrate holder (100) for use in a lithographic apparatus, the substrate holder comprising a main body having a first surface and a second surface opposite the first surface.A plurality of first burls are provided on the first surface, the first burls having end surfaces to support a substrate. A plurality of second burls are provided on the second surface to support the substrate holder on a structure. The plurality of first burls each comprise a lower body portion protruding from the first surface and an upper body portion above the lower body portion, the lower body portions comprise a different material from the upper body portions, and the upper body portions comprise diamond-like carbon.

公开(公告)号：NL2008630A

公开(公告)日：2012-10-30

申请号：NL2008630

申请日：2012-04-12

Applicant: ASML NETHERLANDS BV

Inventor： BEX JAN ,  KATE NICOLAAS ,  LAFARRE RAYMOND ,  BRINKHOF EUGENE ,  DAMEN JOHANNES ,  KARADE YOGESH

IPC: G03F7/20 ,  H01L21/68

公开(公告)号：NL2010472A

公开(公告)日：2013-10-23

申请号：NL2010472

申请日：2013-03-19

Applicant: ASML NETHERLANDS BV

Inventor： LAFARRE RAYMOND ,  DZIOMKINA NINA ,  KARADE YOGESH ,  RODENBURG ELISABETH ,  SINGH HARMEET

IPC: H01L21/683 ,  G03F7/20

Abstract: A substrate holder for use in a lithographic apparatus, the substrate holder including: a main body having a surface; a plurality of burls projecting from the surface and having end surfaces to support a substrate; and a thin film stack on the main body surface and forming an electric component, the thin film stack having a conductive layer configured to distribute electrical charge substantially uniformly throughout a plane of the stack in which the conductive layer is positioned.

公开(公告)号：NL2010139A

公开(公告)日：2013-08-06

申请号：NL2010139

申请日：2013-01-17

Applicant: ASML NETHERLANDS BV

Inventor： LAFARRE RAYMOND ,  DONDERS SJOERD ,  KATE NICOLAAS ,  DZIOMKINA NINA ,  KARADE YOGESH ,  RODENBURG ELISABETH

IPC: G03F7/20 ,  H01L21/683

Abstract: Substrate holder (100) for use in a lithographic apparatus, the substrate holder comprising a main body having a first surface and a second surface opposite the first surface.A plurality of first burls are provided on the first surface, the first burls having end surfaces to support a substrate. A plurality of second burls are provided on the second surface to support the substrate holder on a structure. The plurality of first burls each comprise a lower body portion protruding from the first surface and an upper body portion above the lower body portion, the lower body portions comprise a different material from the upper body portions, and the upper body portions comprise diamond-like carbon.

公开(公告)号：NL2009487A

公开(公告)日：2013-04-16

申请号：NL2009487

申请日：2012-09-19

Applicant: ASML NETHERLANDS BV

Inventor： LAFARRE RAYMOND ,  DZIOMKINA NINA ,  KARADE YOGESH ,  RODENBURG ELISABETH ,  DELFT PETER

IPC: G03F7/20 ,  H01L21/683