公开(公告)号：DE60110731T2

公开(公告)日：2006-01-12

申请号：DE60110731

申请日：2001-11-26

Applicant: ASML NETHERLANDS BV

Inventor： DRIESSEN JOHANNES CORNELIS ,  SOEMERS HERMANUS MATHIAS JOANN ,  RENKENS MICHAEL JOZEFA MATHIJS ,  BISSCHOPS THEODORUS HUBERTUS J ,  VERMEULEN JOHANNES PETRUS MART ,  RIJKEN ANTONIUS MARIA

IPC: G03F7/20 ,  H01L21/027 ,  H01L21/68

Abstract: A lithographic projection apparatus includes conduits which supply utilities to components in a vacuum chamber such as object tables and/or associated motors and/or sensors. The conduits are shielded from exposure to the vacuum by conduit conducts having at least the same number of degrees of freedom as their associated object table.

公开(公告)号：DE60110731D1

公开(公告)日：2005-06-16

申请号：DE60110731

申请日：2001-11-26

Applicant: ASML NETHERLANDS BV

Inventor： DRIESSEN JOHANNES CORNELIS ,  SOEMERS HERMANUS MATHIAS JOANN ,  RENKENS MICHAEL JOZEFA MATHIJS ,  BISSCHOPS THEODORUS HUBERTUS J ,  VERMEULEN JOHANNES PETRUS MART ,  RIJKEN ANTONIUS MARIA

IPC: G03F7/20 ,  H01L21/027 ,  H01L21/68

Abstract: A lithographic projection apparatus includes conduits which supply utilities to components in a vacuum chamber such as object tables and/or associated motors and/or sensors. The conduits are shielded from exposure to the vacuum by conduit conducts having at least the same number of degrees of freedom as their associated object table.