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公开(公告)号：NL2009291A
公开(公告)日：2012-09-18
申请号：NL2009291
申请日：2012-08-07
Applicant: ASML NETHERLANDS BV
Inventor： EMPEL TJARKO
IPC: G03F7/20 , H01L21/687
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公开(公告)号：NL2004281A
公开(公告)日：2010-09-20
申请号：NL2004281
申请日：2010-02-22
Applicant: ASML NETHERLANDS BV
Inventor： EMPEL TJARKO , HOUKES MARTIJN , JANSEN NORBERT
IPC: G03F7/20
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