Patent search ap:("ASML NETHERLANDS BV") AND inv:"GROES HENRICUS MARTINUS JOHANNES" Page 1

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发明专利
POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2010967A

公开(公告)日：2013-12-17

申请号：NL2010967

申请日：2013-06-13

Applicant: ASML NETHERLANDS BV

Inventor： BEERENS RUUD , JEUNINK ANDRE , WAL MARINUS , AANGENENT WILHELMUS HENRICUS THEODORUS MARIA , LIESHOUT RICHARD HENRICUS ADRIANUS , GROES HENRICUS MARTINUS JOHANNES , HOEVEN SAARTJE WILLEMIJN

IPC: G03F7/20 , G03F9/00

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