公开(公告)号：NL2008353A

公开(公告)日：2012-10-02

申请号：NL2008353

申请日：2012-02-27

Applicant: ASML NETHERLANDS BV

Inventor： VERMEULEN JOHANNES ,  AKKERMANS JOHANNES ,  WAL MARINUS ,  BEERENS RUUD ,  HUANG YANG-SHAN ,  AANGENENT WOUTER

IPC: G03F7/20

公开(公告)号：NL2010967A

公开(公告)日：2013-12-17

申请号：NL2010967

申请日：2013-06-13

Applicant: ASML NETHERLANDS BV

Inventor： BEERENS RUUD ,  JEUNINK ANDRE ,  WAL MARINUS ,  AANGENENT WILHELMUS HENRICUS THEODORUS MARIA ,  LIESHOUT RICHARD HENRICUS ADRIANUS ,  GROES HENRICUS MARTINUS JOHANNES ,  HOEVEN SAARTJE WILLEMIJN

IPC: G03F7/20 ,  G03F9/00

公开(公告)号：NL2007606A

公开(公告)日：2012-05-23

申请号：NL2007606

申请日：2011-10-17

Applicant: ASML NETHERLANDS BV

Inventor： BUTLER HANS ,  HOUKES MARTIJN ,  KAMIDI RAMIDIN ,  WAL MARINUS ,  WIJDEVEN JEROEN

IPC: G03F7/20 ,  H01L21/768

Abstract: A controller is provided that controls an actuator system having a plurality of actuators arranged to act on an object. The controller uses a gain balancing matrix to convert a first control signal, representing a set of forces desired to be provided to the center of gravity of the object into a second control signal, representing an equivalent set of forces to be provided by the plurality of actuators. The system is further configured such that a first gain balancing matrix is used at a first frequency band and a second gain balancing matrix is used at a second frequency band.