公开(公告)号：NL2006514A

公开(公告)日：2011-11-14

申请号：NL2006514

申请日：2011-04-01

Applicant: ASML NETHERLANDS BV

Inventor： CADEE THEODORUS ,  ZAAL KOEN ,  HOL TIMO ,  KOOT MICHAEL WILHELMUS THEODORUS

IPC: G03F7/20 ,  H01L21/68

Abstract: An apparatus configured to handle an object in a contactless manner, the apparatus includes a carrying body having a carrying surface which is configured to be directed towards the object, the carrying surface being provided with a plurality of traction members and a plurality of overpressure members, each overpressure member being provided with at least one exhaust opening, each traction member being provided with an indentation and at least two suction openings that are arranged in the indentation, the at least two suction openings of each traction member being configured to generate a pressure gradient between them so as to create a traction fluid flow in the indentation in a direction substantially parallel to the carrying surface; and a pressure controller configured to control the pressure gradient between the at least two suction openings of each traction member.