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公开(公告)号：NL2005266A
公开(公告)日：2011-05-02
申请号：NL2005266
申请日：2010-08-25
Applicant: ASML NETHERLANDS BV
Inventor： KRUIJT-STEGEMAN YVONNE , BOEF ARIE , JEUNINK ANDRA
IPC: G03F7/00
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