公开(公告)号：NL2010211A

公开(公告)日：2013-08-26

申请号：NL2010211

申请日：2013-01-31

Applicant: ASML NETHERLANDS BV

Inventor： BOEF ARIE

IPC: G01N21/47 ,  G03F7/20

公开(公告)号：NL2008111A

公开(公告)日：2012-08-21

申请号：NL2008111

申请日：2012-01-12

Applicant: ASML NETHERLANDS BV

Inventor： BOEF ARIE

IPC: G03F7/20 ,  G03F9/00

公开(公告)号：NL2008197A

公开(公告)日：2012-08-14

申请号：NL2008197

申请日：2012-01-30

Applicant: ASML NETHERLANDS BV

Inventor： BHATTACHARYYA KAUSTUVE ,  BOEF ARIE ,  KEIJ STEFAN ,  VANOPPEN PETER

IPC: G03F7/20 ,  G03F9/00

公开(公告)号：NL2007361A

公开(公告)日：2012-04-02

申请号：NL2007361

申请日：2011-09-06

Applicant: ASML NETHERLANDS BV

Inventor： BOEF ARIE ,  KHUAT DUY PLACE

IPC: G01N21/47 ,  G03F7/20

公开(公告)号：NL2007127A

公开(公告)日：2012-02-07

申请号：NL2007127

申请日：2011-07-18

Applicant: ASML NETHERLANDS BV

Inventor： SCHAAR MAURITS ,  BOEF ARIE ,  MOS EVERHARDUS ,  FUCHS ANDREAS ,  COOGANS MARTYN ,  SMILDE HENDRIK

IPC: G03F7/20

公开(公告)号：NL2007088A

公开(公告)日：2012-01-23

申请号：NL2007088

申请日：2011-07-12

Applicant: ASML NETHERLANDS BV

Inventor： SCHAAR MAURITS ,  BOEF ARIE ,  FUCHS ANDREAS ,  COOGANS MARTYN ,  BHATTACHARYYA KAUSTUVE ,  MORGAN STEPHEN PETER ,  KUBIS MICHAEL

IPC: G01N21/47 ,  G03F7/20

Abstract: A method of determining an overlay error. Measuring an overlay target having process-induced asymmetry. Constructing a model of the target. Modifying the model, e.g., by moving one of the structures to compensate for the asymmetry. Calculating an asymmetry-induced overlay error using the modified model. Determining an overlay error in a production target by subtracting the asymmetry-induced overlay error from a measured overlay error. In one example, the model is modified by varying asymmetry p(n′), p(n″) and the calculating an asymmetry-induced overlay error is repeated for a plurality of scatterometer measurement recipes and the step of determining an overlay error in a production target uses the calculated asymmetry-induced overlay errors to select an optimum scatterometer measurement recipe used to measure the production target.

公开(公告)号：NL2005434A

公开(公告)日：2011-06-21

申请号：NL2005434

申请日：2010-10-01

Applicant: ASML NETHERLANDS BV

Inventor： WUISTER SANDER ,  BOEF ARIE ,  KRUIJT-STEGEMAN YVONNE

IPC: G03F7/00

公开(公告)号：NL2005266A

公开(公告)日：2011-05-02

申请号：NL2005266

申请日：2010-08-25

Applicant: ASML NETHERLANDS BV

Inventor： KRUIJT-STEGEMAN YVONNE ,  BOEF ARIE ,  JEUNINK ANDRA

IPC: G03F7/00

公开(公告)号：NL2005162A

公开(公告)日：2011-02-02

申请号：NL2005162

申请日：2010-07-27

Applicant: ASML NETHERLANDS BV

Inventor： CRAMER HUGO ,  BOEF ARIE ,  MEGENS HENRICUS ,  SMILDE HENDRIK ,  SCHELLEKENS ADRIANUS ,  KUBIS MICHAEL

IPC: G01N21/47 ,  G03F7/20

公开(公告)号：NL2004539A

公开(公告)日：2010-12-23

申请号：NL2004539

申请日：2010-04-13

Applicant: ASML NETHERLANDS BV ,  ASML HOLDING NV

Inventor： BOEF ARIE ,  VLADIMIRSKY YULI ,  SHMAREV YEVGENIY ,  SCACCABAROZZI LUIGI ,  THARALDSEN ROBERT ,  JACOBS RICHARD

IPC: G01N21/95 ,  H01L21/66 ,  H01L23/544