Patent search ap:("ASML NETHERLANDS BV") AND inv:"KEIJ STEFAN" Page 1

1.

发明专利
INSPECTION APPARATUS AND METHOD, LITHOGRAPHIC APPARATUS, LITHOGRAPHIC PROCESSING CELL AND DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2008197A

公开(公告)日：2012-08-14

申请号：NL2008197

申请日：2012-01-30

Applicant: ASML NETHERLANDS BV

Inventor： BHATTACHARYYA KAUSTUVE , BOEF ARIE , KEIJ STEFAN , VANOPPEN PETER

IPC: G03F7/20 , G03F9/00

Patent Agency Ranking