公开(公告)号：SG182568A1

公开(公告)日：2012-08-30

申请号：SG2012052643

申请日：2010-12-08

Applicant: ASML NETHERLANDS BV

Inventor： YAKUNIN ANDREI ,  KRIVTSUN VLADIMIR ,  MEDVEDEV VIACHESLAV ,  KODENTSOV ALEXANDRE

Abstract: A spectral purity filter includes a body of material, through which a plurality of apertures extend. The apertures are arranged to suppress radiation having a first wavelength and to allow at least a portion of radiation having a second wavelength to be transmitted through the apertures. The second wavelength of radiation is shorter than the first wavelength of radiation. The body of material is formed from tungsten-molybdenum alloy or a molybdenum-rhenium alloy or a tungsten-rhenium alloy or a tungsten-molybdenum-rhenium alloy.

公开(公告)号：NL2004984A

公开(公告)日：2010-08-12

申请号：NL2004984

申请日：2010-06-28

Applicant: ASML NETHERLANDS BV

Inventor： YAKUNIN ANDREI ,  KRIVTSUN VLADIMIR ,  MEDVEDEV VIACHESLAV ,  KODENTSOV ALEXANDRE

IPC: G02B5/20 ,  G03F7/20