公开(公告)号：JP2011004592A

公开(公告)日：2011-01-06

申请号：JP2010133470

申请日：2010-06-11

Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

Inventor： MAKAROVIC JURAJ ,  KOOPS RODY ,  VAN ZUTPHEN TOM

IPC: H02K41/02 ,  G03F7/20 ,  H01L21/027 ,  H02K3/26 ,  H02K41/03

CPC classification number: G03F7/70758 ,  H01F5/00 ,  H01F2027/2857 ,  H02K3/04 ,  H02K3/40 ,  H02K9/22 ,  H02K11/01 ,  H02K41/02 ,  H02K41/0354 ,  H02K2201/18

Abstract: PROBLEM TO BE SOLVED: To provide a coil for preventing the occurrence of a peak with a high electric-field strength.SOLUTION: A positioning device includes a planar motor having two sets of stators and translators. One set of the stator and the translator has a periodical magnetic structure, and another set of the stator and translator includes at least one coil applied to carry a current. The coil includes the wound strip of a sheeted conductive material, and the edge of the coil has a round profile.

Abstract translation: 要解决的问题：提供一种用于防止高电场强度发生峰值的线圈。解决方案：定位装置包括具有两组定子和平移器的平面电动机。 一组定子和平移器具有周期性的磁性结构，另外一组定子和转换器包括至少一个用于承载电流的线圈。 线圈包括片状导电材料的缠绕条，线圈的边缘具有圆形轮廓。

公开(公告)号：JP2011083180A

公开(公告)日：2011-04-21

申请号：JP2010198718

申请日：2010-09-06

Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

Inventor： KOOPS RODY ,  VOSTERS PETRUS MATTHIJS HENRICUS ,  STADHOUDERS FRANCISCUS

IPC: H02K3/24 ,  H01L21/027

CPC classification number: H01F7/127 ,  G03F7/70758 ,  Y10T29/49826

Abstract: PROBLEM TO BE SOLVED: To provide an actuator that improves heat dissipation of a coil and acquires a large output. SOLUTION: An actuator includes a coil 3, a cooling body 5 configured to cool the coil 3, a quantity of heat transfer materials 8 fixedly arranged between the cooling body 5 and the coil 3, and a mechanical attacher 10 configured to attach the coil 3 to the cooling body 5. COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供一种提高线圈散热并获得大输出的致动器。 解决方案：致动器包括线圈3，构造成冷却线圈3的冷却体5，固定地布置在冷却体5和线圈3之间的一定数量的传热材料8，以及被配置为附接 线圈3到冷却体5.版权所有（C）2011，JPO＆INPIT

公开(公告)号：NL2005236A

公开(公告)日：2011-03-17

申请号：NL2005236

申请日：2010-08-17

Applicant: ASML NETHERLANDS BV

Inventor： KOOPS RODY ,  VOSTERS PETRUS ,  STADHOUDERS FRANCISCUS

IPC: G03F7/20 ,  H01L21/68

公开(公告)号：NL2004752A

公开(公告)日：2010-12-20

申请号：NL2004752

申请日：2010-05-20

Applicant: ASML NETHERLANDS BV

Inventor： MAKAROVIC JURAJ ,  KOOPS RODY ,  ZUTPHEN TOM

IPC: G03F7/20 ,  H02K41/03