公开(公告)号：JP2011004592A

公开(公告)日：2011-01-06

申请号：JP2010133470

申请日：2010-06-11

Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

Inventor： MAKAROVIC JURAJ ,  KOOPS RODY ,  VAN ZUTPHEN TOM

IPC: H02K41/02 ,  G03F7/20 ,  H01L21/027 ,  H02K3/26 ,  H02K41/03

CPC classification number: G03F7/70758 ,  H01F5/00 ,  H01F2027/2857 ,  H02K3/04 ,  H02K3/40 ,  H02K9/22 ,  H02K11/01 ,  H02K41/02 ,  H02K41/0354 ,  H02K2201/18

Abstract: PROBLEM TO BE SOLVED: To provide a coil for preventing the occurrence of a peak with a high electric-field strength.SOLUTION: A positioning device includes a planar motor having two sets of stators and translators. One set of the stator and the translator has a periodical magnetic structure, and another set of the stator and translator includes at least one coil applied to carry a current. The coil includes the wound strip of a sheeted conductive material, and the edge of the coil has a round profile.

Abstract translation: 要解决的问题：提供一种用于防止高电场强度发生峰值的线圈。解决方案：定位装置包括具有两组定子和平移器的平面电动机。 一组定子和平移器具有周期性的磁性结构，另外一组定子和转换器包括至少一个用于承载电流的线圈。 线圈包括片状导电材料的缠绕条，线圈的边缘具有圆形轮廓。

公开(公告)号：JP2008138871A

公开(公告)日：2008-06-19

申请号：JP2007284676

申请日：2007-11-01

Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

Inventor： MAKAROVIC JURAJ

IPC: F16F15/03 ,  H01L21/027 ,  H01L21/68

CPC classification number: F16F15/035 ,  G03F7/709 ,  H02K49/04

Abstract: PROBLEM TO BE SOLVED: To provide an eddy current damper for actualizing effective damping over a wide frequency range. SOLUTION: The eddy current damper comprises a conductor having a surface, and a magnet array extending over the surface of the conductor. Each magnet generates a magnetic field basically directed horizontally to the surface of the conductor. The magnet array generates magnetic fields having field widths and directed in mutual opposition. At least one of the magnetic fields, generated by the magnet, has a field width smaller than that of the magnetic field adjacent hereto. The conductor may have an opening having a width smaller than the field width of the corresponding magnetic field. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供用于在宽频率范围内实现有效阻尼的涡流阻尼器。 解决方案：涡流阻尼器包括具有表面的导体和在导体的表面上延伸的磁体阵列。 每个磁体产生基本上水平地指向导体表面的磁场。 磁体阵列产生具有场宽并相互指向的磁场。 由磁体产生的至少一个磁场的场宽小于与其相邻的磁场的场宽。 导体可以具有宽度小于相应磁场的磁场宽度的开口。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：NL2004752A

公开(公告)日：2010-12-20

申请号：NL2004752

申请日：2010-05-20

Applicant: ASML NETHERLANDS BV

Inventor： MAKAROVIC JURAJ ,  KOOPS RODY ,  ZUTPHEN TOM

IPC: G03F7/20 ,  H02K41/03