Patent search ap:("ASML NETHERLANDS BV") AND inv:"LEEST ADRIAAN" Page 1

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发明专利
METHOD AND INSPECTION APPARATUS AND COMPUTER PROGRAM PRODUCT FOR ASSESSING A QUALITY OF RECONSTRUCTION OF A VALUE OF A PARAMETER OF INTEREST OF A STRUCTURE. 未知

公开(公告)号：NL2013303A

公开(公告)日：2015-02-16

申请号：NL2013303

申请日：2014-08-05

Applicant: ASML NETHERLANDS BV

Inventor： MOSSAVAT SEYED IMAN , CRAMER HUGO , GROOTJANS WILLEM JAN , LEEST ADRIAAN

IPC: G01N21/47 , G03F7/20

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