Patent search ap:("ASML NETHERLANDS BV") AND inv:"NUNEN GERARDUS PETRUS MATTHIJS VAN" Page 1

1.

发明专利
Method of transferring a substrate, transfer system and lithographic projection apparatus. 未知

公开(公告)号：NL1036025A1

公开(公告)日：2009-04-15

申请号：NL1036025

申请日：2008-10-07

Applicant: ASML NETHERLANDS BV

Inventor： ALBERTI JOZEF AUGUSTINUS MARIA , NUNEN GERARDUS PETRUS MATTHIJS VAN , GROENSMIT FRANS ERIK , COMPEN RENE THEODORUS PETRUS

IPC: G03F9/00 , G03F7/20

2.

发明专利
Method of transferring a substrate, transfer system and lithographic projection apparatus. 未知

公开(公告)号：NL1036033A1

公开(公告)日：2009-04-15

申请号：NL1036033

申请日：2008-10-08

Applicant: ASML NETHERLANDS BV

Inventor： ALBERTI JOZEF AUGUSTINUS MARIA , NUNEN GERARDUS PETRUS MATTHIJS VAN , GROENSMIT FRANS ERIK , COMPEN RENE THEODORUS PETRUS

IPC: H01L21/68 , G03F7/20 , G03F9/00

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