公开(公告)号：NL2006804A

公开(公告)日：2011-12-28

申请号：NL2006804

申请日：2011-05-18

Applicant: ASML NETHERLANDS BV

Inventor： COX HENRIKUS ,  KOENEN WILLEM ,  MATTAAR THOMAS ,  PIETERSE MARTINUS THEODORUS JACOBUS ,  VERKOOIJEN ROB ANTONIUS ANDRIES

IPC: G03F7/20 ,  H01L21/68

Abstract: A measurement system is configured to derive a position quantity of an object, the measurement system includes at least one position quantity sensor configured to provide respective position quantity measurement signals; a position quantity calculator configured to determine a position quantity of the object from the position quantity measurement signal, wherein the position quantity calculator includes a torsion estimator configured to estimate a torsion of the object, the position quantity calculator being configured to correct the determined position quantity of the object for the estimated torsion.