公开(公告)号：NL2003846A

公开(公告)日：2010-06-22

申请号：NL2003846

申请日：2009-11-23

Applicant: ASML NETHERLANDS BV

Inventor： VERMEULEN JOHANNES ,  WIJST MARC ,  CADEE THEODORUS ,  JACOBS FRANSISCUS ,  VALENTIN CHRISTIAAN LOUIS ,  BAGGEN MARCEL ,  BUTLER HANS ,  COX HENRIKUS ,  EIJK JAN ,  JEUNINK ANDRE ,  KEMPER NICOLAAS ,  SCHMIDT ROBERT-HAN MUNNIG ,  PASCH ENGELBERTUS

IPC: G03F9/00

Abstract: A lithographic apparatus includes a position controller configured to control a position of a patterning device in its planar direction by selectively pressing at least one of the side faces of the patterning device. The position controller includes a gas pressure supply and one or more outflow openings directed towards at least one side face of the patterning device so as to exert pressurized gas on this side face in order to control the position of the patterning device in its planar direction in a contactless manner.

公开(公告)号：NL2008831A

公开(公告)日：2013-01-02

申请号：NL2008831

申请日：2012-05-16

Applicant: ASML NETHERLANDS BV

Inventor： LAFARRE RAYMOND ,  COX HENRIKUS ,  GROOT ANTONIUS ,  VERMEULEN JOHANNES

IPC: G03F7/20 ,  H01L21/68

公开(公告)号：NL2006804A

公开(公告)日：2011-12-28

申请号：NL2006804

申请日：2011-05-18

Applicant: ASML NETHERLANDS BV

Inventor： COX HENRIKUS ,  KOENEN WILLEM ,  MATTAAR THOMAS ,  PIETERSE MARTINUS THEODORUS JACOBUS ,  VERKOOIJEN ROB ANTONIUS ANDRIES

IPC: G03F7/20 ,  H01L21/68

Abstract: A measurement system is configured to derive a position quantity of an object, the measurement system includes at least one position quantity sensor configured to provide respective position quantity measurement signals; a position quantity calculator configured to determine a position quantity of the object from the position quantity measurement signal, wherein the position quantity calculator includes a torsion estimator configured to estimate a torsion of the object, the position quantity calculator being configured to correct the determined position quantity of the object for the estimated torsion.

公开(公告)号：NL2009692A

公开(公告)日：2013-06-10

申请号：NL2009692

申请日：2012-10-25

Applicant: ASML NETHERLANDS BV

Inventor： POLET THEODORUS ,  COX HENRIKUS ,  HAM RONALD ,  SIMONS WILHELMUS ,  WINKEL JIMMY ,  CORCORAN GREGORY ,  BOXTEL FRANK

IPC: G03F7/20

公开(公告)号：NL2007633A

公开(公告)日：2012-05-23

申请号：NL2007633

申请日：2011-10-20

Applicant: ASML NETHERLANDS BV

Inventor： BUTLER HANS ,  COX HENRIKUS

IPC: G03F7/20 ,  H01L21/68