Patent search ap:("ASML NETHERLANDS BV") AND inv:"POLKOVNIKOV VLADIMIR NIKOLAEVICH" Page 1

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发明专利
MULTILAYER MIRROR, METHOD AND LITHOGRAPHIC APPARATUS. 未知

公开(公告)号：NL2007853A

公开(公告)日：2011-12-19

申请号：NL2007853

申请日：2011-11-24

Applicant: ASML NETHERLANDS BV

Inventor： YAKUNIN ANDREI , SJMAENOK LEONID , SALASCHENKO NIKOLAI , GLUSHKOV DENNIS , POLKOVNIKOV VLADIMIR NIKOLAEVICH

IPC: G02B1/10 , G03F7/20

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