公开(公告)号：NL2007853A

公开(公告)日：2011-12-19

申请号：NL2007853

申请日：2011-11-24

Applicant: ASML NETHERLANDS BV

Inventor： YAKUNIN ANDREI ,  SJMAENOK LEONID ,  SALASCHENKO NIKOLAI ,  GLUSHKOV DENNIS ,  POLKOVNIKOV VLADIMIR NIKOLAEVICH

IPC: G02B1/10 ,  G03F7/20

公开(公告)号：SG174126A1

公开(公告)日：2011-10-28

申请号：SG2011055241

申请日：2010-01-11

Applicant: ASML NETHERLANDS BV

Inventor： GLUSHKOV DENIS ,  BANINE VADIM ,  SJMAENOK LEONID ,  SALASCHENKO NIKOLAI ,  CHKHALO NIKOLAY

Abstract: A multilayer mirror (7) is constructed and arranged to reflect radiation having a wavelength in the range of 2-8 nm. The multilayer mirror has alternating layers (4, 6), the alternating layers comprising a first layer and a second layer, the first and second layers being selected from the group consisting of : U and B4C layers, Th and B4C layers, La and B9C layers, La and B4C layers, U and B9C layers, Th and B9C layers, La and B layers, U and B layers, C and B layers, Th and B layers, U compound and B4C layers, Th compound and B4C layers, La compound and B9C layers, La compound and B4C layers, U compound and a B9C layers, Th compound and a B9C layers, La compound and a B layers, U compound and B layers, and Th compound and a B layers, wherein at least one of the first layers is separated from the second layer by an interlayer (7) disposed between at least one of the first layers and the second layer.

公开(公告)号：NL2002908A1

公开(公告)日：2009-12-07

申请号：NL2002908

申请日：2009-05-20

Applicant: ASML NETHERLANDS BV

Inventor： GLUSHKOV DENIS ,  BANINE VADIM ,  MOORS ROEL ,  SJMAENOK LEONID ,  SALASCHENKO NIKOLAI

IPC: G03F7/20 ,  G01B5/08