Patent search ap:("ASML NETHERLANDS BV") AND inv:"PSARA ELENI" Page 1

1.

发明专利
METHOD OF CHARACTERISING, METHOD OF FORMING A MODEL, METHOD OF SIMULATING, MASK MANUFACTURING METHOD AND DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2013630A

公开(公告)日：2015-05-07

申请号：NL2013630

申请日：2014-10-14

Applicant: ASML NETHERLANDS BV

Inventor： SETTEN EELCO , DAVYDOVA NATALIA , PSARA ELENI , OOSTEN ANTON

IPC: H01L21/02

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