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公开(公告)号：NL2013630A
公开(公告)日：2015-05-07
申请号：NL2013630
申请日：2014-10-14
Applicant: ASML NETHERLANDS BV
Inventor： SETTEN EELCO , DAVYDOVA NATALIA , PSARA ELENI , OOSTEN ANTON
IPC: H01L21/02
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公开(公告)号：NL2008523A
公开(公告)日：2012-05-03
申请号：NL2008523
申请日：2012-03-22
Applicant: ASML NETHERLANDS BV
Inventor： GIJSBERTSEN ARJAN , GERAETS HUBERTUS ANTONIUS , SEGERS BART , DAVYDOVA NATALIA
IPC: G03F7/20
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