Patent search ap:("ASML NETHERLANDS BV") AND inv:"TOORN JAN-GERARD CORNELIS" Page 1

1.

发明专利
LITHOGRAPHIC APPARATUS AND STAGE SYSTEM. 未知

公开(公告)号：NL2008178A

公开(公告)日：2012-08-28

申请号：NL2008178

申请日：2012-01-25

Applicant: ASML NETHERLANDS BV

Inventor： TOORN JAN-GERARD CORNELIS , BAGGEN MARCEL , KRUIJSWIJK STEFAN , STARREVELD JEROEN , BAGGEN MARK , VERVOORDELDONK MICHAEL

IPC: G03F7/20 , H01L21/68

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