Patent search ap:("ASML NETHERLANDS BV") AND inv:"TYCHKOV ANDREY" Page 1

1.

发明专利
BEAM DELIVERY SYSTEM FOR AN EUV RADIATION SOURCE, EUV RADIATION SOURCE AND METHOD OF GENERATING EUV RADIATION. 未知

公开(公告)号：NL2011514A

公开(公告)日：2014-05-06

申请号：NL2011514

申请日：2013-09-27

Applicant: ASML NETHERLANDS BV

Inventor： EURLINGS MARKUS , TYCHKOV ANDREY , MOORS JOHANNES

IPC: G03F7/20 , H05G2/00

2.

发明专利
ILLUMINATION SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD. 未知

公开(公告)号：NL2008009A

公开(公告)日：2012-08-06

申请号：NL2008009

申请日：2011-12-21

Applicant: ASML NETHERLANDS BV

Inventor： TYCHKOV ANDREY

IPC: G03F7/20

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