Patent search ap:("ASML NETHERLANDS BV") AND inv:"VOS YOUSSEF KAREL MARIA" Page 1

1.

发明专利
LITHOGRAPHIC APPARATUS, OBJECT POSITIONING SYSTEM, METHOD FOR POSITIONING AND DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2013828A

公开(公告)日：2015-06-26

申请号：NL2013828

申请日：2014-11-19

Applicant: ASML NETHERLANDS BV

Inventor： HEMPENIUS PETER PAUL , HOUBEN MARTIJN , KEMPER NICOLAAS RUDOLF , RIJS ROBERTUS MATHIJS GERARDUS , WIT PAUL CORNÃ HENRI , BOERE STIJN WILLEM , VOS YOUSSEF KAREL MARIA , MEULEN FRITS

IPC: G03F7/20 , H01L21/68

Patent Agency Ranking