公开(公告)号：WO2019185233A1

公开(公告)日：2019-10-03

申请号：PCT/EP2019/053535

申请日：2019-02-13

Applicant: ASML NETHERLANDS B.V.

Inventor： WEIJDEN, Ivo, Matteo, Leonardus ,  VAN DONGEN, Jeroen ,  LAMBREGTS, Cornelis, Johannes, Henricus ,  THIJSSEN, Theo, Wilhelmus, Maria ,  DE WIT, Ruud, Rudolphus, Johannes, Catharinus ,  STRUIJS, Hans, Marinus ,  CROMBAG, Erik, Mathijs, Maria ,  WERKMAN, Roy ,  SCHUT, Maria, Helena ,  RIEMENS, Erwin ,  MEELDIJK, Menno

IPC: G03F7/20 ,  H01L21/66

Abstract: Disclosed is a method for determining a preferred control strategy relating to control of a manufacturing process for manufacturing an integrated circuit. The method comprises: obtaining process data associated with a design of said integrated circuit; and obtaining a plurality of candidate control strategies configured to control the manufacturing process based on the process data, each candidate control strategy comprising an associated cost metric based on an associated requirement to implement the candidate control strategy. A quality metric related to an expected performance of the manufacturing process is determined for each candidate control strategies, and a preferred control strategy is selected based on the determined quality metrics and associated cost metrics for each candidate control strategy.

公开(公告)号：EP3547031A1

公开(公告)日：2019-10-02

申请号：EP19156892.2

申请日：2019-02-13

Applicant: ASML Netherlands B.V.

Inventor： WEIJDEN, Ivo, Matteo, Leonardus ,  VAN DONGEN, Jeroen ,  LAMBREGTS, Cornelis, Johannes, Henricus ,  THIJSSEN, Theo, Wilhelmus, Maria ,  DE WIT, Ruud, Rudolphus, Johannes, Catharinus ,  STRUIJS, Hans, Marinus ,  CROMBAG, Erik, Mathijs, Maria ,  WERKMAN, Roy ,  SCHUT, Maria, Helena ,  RIEMENS, Erwin ,  MEELDIJK, Menno

IPC: G03F7/20 ,  H01L21/66

Abstract: Disclosed is a method for determining a preferred control strategy relating to control of a manufacturing process for manufacturing an integrated circuit. The method comprises: obtaining process data associated with a design of said integrated circuit; and obtaining a plurality of candidate control strategies configured to control the manufacturing process based on the process data, each candidate control strategy comprising an associated cost metric based on an associated requirement to implement the candidate control strategy. A quality metric related to an expected performance of the manufacturing process is determined for each candidate control strategies, and a preferred control strategy is selected based on the determined quality metrics and associated cost metrics for each candidate control strategy.