公开(公告)号：WO1997037056A1

公开(公告)日：1997-10-09

申请号：PCT/US1997006060

申请日：1997-03-28

Applicant: ATMI ECOSYS CORPORATION

Inventor： ATMI ECOSYS CORPORATION ,  LANE, Scott ,  SHAH, Dinesh ,  COLMAN, Ronald ,  HEADING, Liam, R. ,  SIMPSON, Eric

IPC: C23C16/00

CPC classification number: C23C16/4412 ,  B01D53/74 ,  B01J3/002

Abstract: A pressure stabilization system for damping pressure variations in a process (10) discharging an effluent gas stream, in which the process is pressure-sensitive and downstream pressure variations can adversely affect the upstream process, comprising a motive fluid driver (38) to receive the effluent gas stream, and means (3) for sensing a pressure characteristic of the effluent gas stream and adjusting the flow of the effluent gas stream to damp pressure fluctuations. The pressure stabilization system may further comprise: (i) a variable frequency drive (170) for operating the motive fluid driver at a variable rotational speed; (ii) a pressure transducer monitor (186) for monitoring the pressure characteristic of the effluent gas stream and generating a pressure transduced signal; and (iii) a proportional integral derivative controller (188) coupled with the pressure transducer monitor (186), and responsive to the pressure transduced signal to adjust the variable frequency drive to damp pressure fluctuations.

Abstract translation: 一种压力稳定系统，用于减轻排出流出气体流的过程（10）中的压力变化的压力变化，其中所述过程是压敏和下游压力变化可能不利地影响上游过程，包括运动流体驱动器（38） 流出气流，以及用于感测流出气流的压力特性并调节流出气流的流动以减轻压力波动的装置（3）。 压力稳定系统还可以包括：（i）用于以可变转速操作动力流体驱动器的变频驱动器（170）; （ii）压力传感器监测器（186），用于监测废气流的压力特性并产生压力转换信号; 和（iii）与压力传感器监视器（186）耦合的比例积分微分控制器（188），并且响应于压力传导信号来调节变频驱动器以减轻压力波动。